Abstract
An experimental study on the energy spectra of ions emitted from the surface of a polycrystalline Cu target under the bombardment by 2 keV O2+ molecular ions was carried out. Sputtered atomic ions Cu+ and O+ were prevailed among the positively charged secondary ions, and among the negative ions, in addition to sputtered ions Cu-, CuO2-, O-, and O2-, intense elastically and inelastically backscattered O- and O2+ ions were revealed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
