Abstract
The features of the microstructure and piezoelectric response of perovskite islands in the matrix of the pyrochloric phase in thin lead zirconate titanate films formed by the method of radio-frequency magnetron sputtering are investigated. The radial heterogeneity of the surface morphology of the islands and the piezoelectric response is revealed. The role of two-dimensional mechanical stresses acting on a thin film from the side of the silicon substrate is discussed.
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