Abstract

Features of the microstructure and piezoelectric response of perovskite islands in a pyrochlore phase matrix in lead zirconate titanate thin films prepeared by the radio-frequency magnetron sputtering method are investigated. The radial inhomogeneity of the surface morphology and piezoresponse of the islands are revealed. The role of two-dimensional mechanical stresses acting on the thin film from the silicon substrate side is discussed.

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