Products consisted of Al-doped ZnO nanodisks and ZnO nanorod clusters were synthesized by chemical co-deposition process. The nanodisks with large polar surface are about 1–2 µm in diameter and 20 nm in thickness. The ZnO nanorods have an average diameter of 40 nm. The content of ZnO nanodisks can be adjusted by Al 3+ content. The growth mechanism of the ZnO nanodisks is also discussed. Room temperature photoluminescence (PL) measurements show that photoluminescence peaks of the products decrease with the increase of Al content.