In this study, the localized surface plasmon resonances (LSPRs) of Ag nanoparticles (NPs) embedded in ZnO dielectric matrices were studied. Initially, continuous Ag thin films were deposited on Corning glass substrates via magnetron sputtering, followed by post annealing, resulting in the formation of self-assembled nanoparticles. In some cases, a heated substrate holder was employed to induce NP formation during the deposition. The morphology of nanoparticles was studied using atomic force microscopy (AFM). Ultraviolet–visible spectroscopy (UV-Vis) probed the LSPRs. Subsequently, a 70 nm thick ZnO layer was deposited on top of the Ag thin films. For the Ag films, LSPR characteristics were found to depend on the initial film thickness. The ZnO capping layer induced an intense red shift, suggesting its potential as a mechanism for tailoring LSPRs. Lastly, theoretical calculations with the rigorous coupled-wave analysis (RCWA) method were carried out for comparison with the experimental results.
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