Summary This paper describes an investigation of the depth profiles of oxygen [O] and nitrogen [N] in TIG weld metals of Zircaloy‐2 tubing by two methods: a calculation‐based method for chemical analysis of [N] in weld metals before and after etching to determine the [N] content in the weld metal surface layer, and a method for direct analysis by SIMS (secondary ion mass spectrometry). The results obtained from the evaluations made by the two methods may be summarised as follows. The [N] content of the weld metal produced in a welding atmosphere with a high PN2 is much higher in the outer part, exponentially decreasing towards the centre. The [N] content of the weld metal outer part decreases with a decreasing PN2 in the welding atmosphere, its depth profile changing to become flat for weld metals produced in a PN2 = 0.4 Pa welding atmosphere. The depth profile of [O] differs significantly from that of [N].