Laser ab la t ion has often been used to obtain high-quality thin ceramic films such as A120 3 [1], Si3N 4 [1], TiN [1], CdTe [2], SnO2 [3], BN [4] and high-T0 superconductor films [5, 6]. A laser ablation system usually consists of a clean vacuum chamber in order to rea l i ze a long mean free path of the atoms in the gas phase. However, certain oxide films can be prepared without a vacuum chamber by chemical vapour deposition (CVD). For example, TiO2 films can be prepared by the traditional method of thermal CVD at atmospheric pressure [7]. This observation has led us to an attempt to produce thin ceramic films by a laser ablation method at atmospheric pressure . Zinc oxide (ZnO) provides a wide range of scientific and technological applications because of its semiconducting, photoconducting and piezoelectric characteristics [8]. This letter reports the preparation of ZnO films by CO2 laser ablation at atmospheric pressure . ZnO targets w e r e prepared by pressing 99.99% purity ZnO powder into circular discs (about 1.3 cm in diameter and 1.0 cm thick). A schematic diagram of the experiment is shown in Fig. 1. A glass substrate was heated to 200-600 °C by an infrared lamp. A c.w. CO2 laser was operated at 75 W and focused on the surface of a ZnO target through a ZnSe lens ( f = 30 cm). The ZnO vapour formed by laser i rradiat ion was brought to the surface of the substrate in a stream of nitrogen gas admitted through a nozzle with a slit size of 1 mm × 8 mm. The distance between the nozzle head and the substrate was 2.3 cm. When the snbstrate was not h e a t e d by the lamp, the substrate t e m p e r a t u r e was raised to about 200 °C by the blowing gas containing the high-temperature ZnO vapour formed by the laser irradiation. The growth rate of the ZnO film
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