YX Lithium Niobate Research Articles

Highly Sensitive SAW Pressure Sensor Based on Simply Supported Beam

In this work, a SAW pressure sensor based on a simply supported beam was designed and fabricated. The SAW resonator deposited on 128° YX-lithium niobate (LNO) substrate was used as the sensing element. The LNO substrate was used as a simply supported beam, therefore strain transfer loss was avoided and uniaxial stress was directly applied to the SAW resonator. An indenter with two ledges was used to indent the LNO beam and then uniform strain was applied to the SAW resonator. The sensitivity was experimentally measured in a pressure range of 330 kPa. The results demonstrated that the sensitivity of the SAW pressure sensor in this work was as high as 2514 ppm/MPa. The high pressure sensitivity of the proposed SAW pressure sensor was analyzed. The device structure of the proposed SAW pressure sensor may help to design highly sensitive SAW pressure sensors.

High performance multilayer heterogeneous resonators based on 128° YX lithium niobate and diamond composite films for 5 GHz and beyond

The advent of the new 5G communication standard has introduced demanding requirements for the performance of RF front-end filters, necessitating high frequency, large bandwidth, and other improved parameters. Consequently, researchers have been actively investigating the potential of surface acoustic wave resonators and film bulk acoustic resonators to address these needs, leading to the development of numerous novel structures. Through finite element simulation, a new heterogeneous stack structure Al/LN/diamond/Si with an interdigitated electrode resonant cavity is proposed. And the advantageous role of a diamond thin film in the surface acoustic wave resonant structure, including the excitation of high-frequency acoustic resonance modes and modulation of the electromechanical coupling coefficient has been studied. This structure holds promise for addressing the increasing demands for high-frequency, large-bandwidth RF front-end filters in the context of the new 5G communication standard. The results show that the central resonant frequency of the new structure resonator is 5284 MHz, the electromechanical coupling coefficient is 10.96%, and the Q factor value is 10 316, which has potential application value in the field of high-frequency filtering.

Piezoelectric point-of-care biosensor for the detection of SARS-COV-2 (COVID-19) antibodies

It is always challenging to diagnose a disease using a biosensor reliably, and quickly with high sensitivity and selectivity, simultaneosuly. Recently the world experienced a global pandemic caused by a novel coronavirus (COVID-19). Although the vaccines are available, COVID-19 resulted a huge threat to the entire world with high mortality rates. Irrespective of a specific disease, there is a constant need for a cheaper and faster in-vitro, lab-on-a-chip sensor with high sensitivity and selectivity. Such sensors will not only facilitate the disease detection but will expedite and vaccine development process through detection of its corresponding antibodies when developed. In this article, we present an ultrasonic guided wave sensor using 128° YX lithium niobate piezoelectric wafer, specially designed in a shape of a multi-threaded comb with cantilever beams which is equally selective and sensitive for the detection of corresponding antigen-antibody assays. As a proof of concept in this article, the diagnostic sensor is created and tested for detection of SARS-COV-2 antibodies. Sensors were functionalized with SARS-COV-2 antigens and target antibody for the same was detected. Unique and judicially tuned acoustic features are analyzed for successful detection of the right antibodies. The proposed lab-on-a-chip device utilizes a wide range of diagnostic frequencies resulting into a highly sensitive platform for the diagnostics even to the slightest biophysical changes. The proposed sensor is also believed to extend to the detection of various other antigens/antibodies of different diseases in the future.

The Peculiarities of the Acoustic Waves of Zero-Order Focusing in Lithium Niobate Plate.

In this research, beam focusing in lithium niobate plate was studied for fundamental anti-symmetric (A0) and symmetric (S0) Lamb waves, and the shear-horizontal (SH0) wave of zero-order. Using the finite element method, appropriate configuration of the interdigital transducer with arc-like electrodes was modeled accounting for the anisotropy of the slowness curves and dispersion of the modes in the plate. Profiles of the focalized acoustic beams generated by the proposed transducer were theoretically analyzed. Based on the result of the analysis, relevant delay lines were fabricated and transfer functions (insertion loss) of the line were measured for SH0 wave in YX-lithium niobate plate. Using an electron scanning microscope, distribution of the electric fields of the same wave were visualized. The results of this study may be useful for hybrid devices and sensors combining nano and acoustoelectronic principles.

Towards single-chip radiofrequency signal processing via acoustoelectric electron\u2013phonon interactions

The addition of active, nonlinear, and nonreciprocal functionalities to passive piezoelectric acoustic wave technologies could enable all-acoustic and therefore ultra-compact radiofrequency signal processors. Toward this goal, we present a heterogeneously integrated acoustoelectric material platform consisting of a 50 nm indium gallium arsenide epitaxial semiconductor film in direct contact with a 41° YX lithium niobate piezoelectric substrate. We then demonstrate three of the main components of an all-acoustic radiofrequency signal processor: passive delay line filters, amplifiers, and circulators. Heterogeneous integration allows for simultaneous, independent optimization of the piezoelectric-acoustic and electronic properties, leading to the highest performing surface acoustic wave amplifiers ever developed in terms of gain per unit length and DC power dissipation, as well as the first-ever demonstrated acoustoelectric circulator with an isolation of 46 dB with a pulsed DC bias. Finally, we describe how the remaining components of an all-acoustic radiofrequency signal processor are an extension of this work.

High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure

Active surface acoustic wave components have the potential to transform RF front ends by consolidating functionalities that currently occur across multiple chip technologies, leading to reduced insertion loss from converting back and forth between acoustic and electronic domains in addition to improved size and power efficiency. This letter demonstrates a significant advance in these active devices with a compact, high-gain, and low-power leaky surface acoustic wave amplifier based on the acoustoelectric effect. Devices use an acoustically thin semi-insulating InGaAs surface film on a YX lithium niobate substrate to achieve exceptionally high acoustoelectric interaction strength via an epitaxial In0.53Ga0.47As(P)/InP quaternary layer structure and wafer-scale bonding. We demonstrate 1.9 dB of gain per acoustic wavelength and power consumption of 90 mW for 30 dB of electronic gain. Despite the strong intrinsic leaky propagation loss, 5 dB of terminal gain is obtained for a semiconductor that is only 338 μm long due to state-of-the-art heterogenous integration and an improved material platform.

Removal of Nonspecifically Bound Proteins on Microarrays Using Surface Acoustic Waves

Nonspecific binding of proteins is an ongoing problem that dramatically reduces the sensitivity and selectivity of biosensors. We demonstrate that ultrasonic waves generated by surface acoustic wave (SAW) devices remove nonspecifically bound proteins from the sensing and nonsensing regions of the microarrays. We demonstrate our approach for controllably and nondestructively cleaning the microarray interface. In this work, SAWs were generated using 128 YX lithium niobate, chosen for its high coupling coefficient and efficient power transfer to mechanical motion. These waves propagating along the surface were coupled into specifically bound and nonspecifically bound proteins on a patterned surface of 40 mum feature size. Fluorescence intensity was used to quantify cleaning efficacy of the microarrays. Our results have shown that excess protein layers and aggregates are removed leaving highly uniform films as evidenced by fluorescence intensity profiles. Selected antigen-receptor interactions remained bound during the acoustic cleaning process when subjected to 11.25 mW of power and retained their efficacy for subsequent antigen capture. Results demonstrate near-complete fluorescence signal recovery for both the sensing and nonsensing regions of the microarrays. Of significance is that our approach can be integrated into existing array technologies where sensing and nonsensing regions are extensively fouled. We believe that this technology will be pivotal in the development and advancement of microsensors and their biological applications.