The growth and magnetic properties of GdIG films grown by chemical vapor deposition on YIG and GdGaG substrates is described. Various aspects of the deposition technique including the design of a concentric tube reactor, hydrodynamics of the gas flow, substrates, and deposition parameters are discussed in detail. GdIG films have been grown at rates as high as 16 μ/h. They are epitaxial and are of the same orientation as the substrate. The films are strained because of mismatch between the film and substrate. A Faraday effect hysteresigraph has been used to measure the coercive force and the compensation temperature. The remanence has been measured as a function of temperature from −40° to 60°C and has been correlated with strains in the film. Diffusion has been observed between the film and substrate. This can be minimized by increased growth rates and by preheating substrates.