Abstract Commercial TEM/STEMs are ill designed for quantitative X-ray microanalysis of thin foils. There have been no fundamental advances in their design since the first instruments appeared in the mid- 1970s. These instruments had thermionic sources with useful probe sizes of ∼10 nm, small (∼ 0.1 sr) detector collection angles, illumination systems giving serious levels of stray radiation, substantial hydrocarbon and water-vapor contamination due to the poor vacuum (∼10-5Pa) and sliding o-ring seals on unstable side-entry goniometer stages. The instruments lacked a direct measure of the probe current at the specimen. Often a 60 s accumulation time resulted in enough drift or contamination that the microanalysis was not trustworthy and spatial resolution was compromised. Today's modern TEM/STEMs, apart from replacement of thermionic source with a FEG, are little better. Dedicated STEMs however, have invariably offered better X-ray performance. The first VG HB 5 DSTEM became available, also in the 1970s, and the X-ray performance improved through to the latest design (the VG HB 603) in the mid-1990s.