Ultra-precision single-point diamond flycutting (SPDF) is an irreplaceable technology for cutting KH2PO4 (KDP) crystals with large size. However, some undesirable waviness errors along feed-direction exist on the machined surface, which could greatly deteriorate the optical performance of KDP crystals. The spindle dynamic characteristic of SPDF plays an important role in the formation of such waviness errors. This paper presents an on-line measurement method with five-capacitance displacement sensors in nanometer range for monitoring the motion errors of the aerostatic spindle. An error transform theory which is based on kinematic error propagation was introduced to obtain the three-dimensional trajectory of the cutting tool. Then, the spindle motion errors and the cutting tool trajectory were analyzed in frequency domain to investigate the main source of the waviness errors. Simultaneously, the three-dimensional topography of work-piece was simulated by combining the motion trajectory and the geometrical morphology of the cutting tool. The results showed that the waviness errors along feed-direction were caused by the spindle rotation fluctuation with a frequency about 10.8 Hz, and the topography simulations showed good agreement with the machining results. Besides, the experimental results indicated that the error can be diminished by changing the spindle control system to the digital control method. This study established the contact between the measured spindle motion errors and the machined surfaces, which contributes to deeper understanding of the dynamic characteristics of the spindle in SPDF.
Read full abstract