Abstract The conventional crossing frequency method for plasma diagnostics measures transmission microwave frequency spectrum, called S_21 spectrum, using transmitting and receiving antennae. It can infer electron density (n_e) from the crossing frequency (f_cross) on which S_21 spectra with plasma generation and vaccum (no plasma generation) intersect. However, this method faces a challenge when it is used inside a cavity, especially a vacuum chamber, due to spike-like peaks in the S_21 spectrum with vacuum. Those peaks disturb the S_21 spectrum and make multiple crossing points, leading to difficulty in determining the f_cross. This paper proposes a method to remove those peaks, named time-domain capacitive coupling detection technique. For preliminary study, a three-dimensional electromagnetic wave simulation was employed and we found the coupling mechanism between antennae and optimum working condition. The proposed method is evaluated in an inductively coupled plasma system. Exepriment results showed the clear removal of spike-like peaks in S_21 spectrum with vacuum inside a cylindrical vacuum chamber. With plasma generation, the n_e from the proposed method shows a good agreement with that from the cutoff probe method, indicating the working in this method. Furthermore, we verified the operation at high pressure in which the cutoff method does not work. As a result, the time-domain direct capacitive coupling detection technique is a technique to measure electron density inside a vacuum chamber, especially at high pressure plasma diagnostics.
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