AbstractIn the technical Müller‐Rochow synthesis, dimethyl dichlorsilane (DMD) is fabricated from methyl chloride which interacts with a ‘contact mass’ consisting of elemental Si and Cu (Cu being a catalyst). In order to better understand some of the elementary steps of this reaction, we have followed the adsorption of methyl chloride on a (7×7) reconstructed Si(111) surface in the temperature range between 100 and 1000 K by means of LEED, Auger electron spectroscopy (AES), temperature‐programmed thermal desorption (TPD), vibrational loss spectroscopy (HREELS), and work function change (Δϕ) measurements. CH3C1 adsorbs effectively in a single weakly chemisorbed state. The adsorption energy is strongly coverage‐dependent and decreases from initially ˜ 40 kJ/mol to ˜ 30 kJ/mol near the monolayer. During adsorption, the work function of the Si(111) surface first increases sharply by 0.36 eV and saturates, after an intermediate maximum of ˜ 40 eV near the monolayer, at ˜ 0.61 eV. CH3C1‐derived vibrational losses appear at 88, 176, 340, and 370 meV and can be associated with known gas phase vibrations of CH3C1. An additional band at 260 meV is tentatively ascribed to the Si‐H stretching vibration, pointing to competing dissociation of adsorbed CH3C1 into hydrogen and methylene chloride CH2C1. Otherwise, CH3C1 does not react with Si(111) under our UHV conditions (CH3C1 partial pressures ≤10−5 mbar, 100 ≤T≤300 K), as the absence of any C1‐ and/or Si‐containing mass fragments in the TPD spectra proves. We deduce from our investigation that the combined chlorination and methylation of Si in the technical Müller‐Rochow process is dictated by processes which run only at much larger (atmospheric) pressures and/or elevated temperatures.
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