Vertical aligned carbon nanotube (CNT) films are promising candidates for electrode surfaces in super capacitors suitable for electric energy storage. The CNT films provide a matrix with low internal resistance and a directed pore system for fast ion diffusion, both being crucial for high power supercap devices. The contribution describes the deposition process and properties of multiwall and single wall CNTs on various metallic substrates by thermal CVD. Up to 100 micron thick, well-aligned CNT films were obtained on Ni-substrates. For polished steel substrates flower-like and columnar structures are observed indicating side reactions of the substrate with the catalyst particles.