Preparation of parallel arrayed carbon nanotube film and its structure research

Abstract

In an atmosphere of hydrogen and methane mixture, we have grown well-aligned carbon nanotube film on a Si slice by microwave plasma enhanced chemical vapor deposition. Observing and analyzing through SEM, TEM, and Raman spectra, we found that carbon nanotubes were vertically arrayed in the film. Their diameters are approximately 40–60 nm, and the lengths are about 4.0 μm. This well-aligned carbon nanotube film will be a very promising material for electron emitters in field emission displays.