Abstract In this article, we present the results of sputtering yield measurements of Kapton, PEEK and PTFE due to xenon ions bombardment. We measured these yield using the weight loss technique, for energies ranging from \qtyrange[range-units = single]{350}{800}{\eV} and incidence angles from \qtyrange[range-units = single]{0}{75}{\degree}. Polymers sputtering yield dependence versus incidence angle appears to be much lower than what we usually observe on other materials (such as metals). Furthermore, PTFE exhibits a very high erosion rate, which is two orders of magnitude bigger than Kapton and PEEK one. We also performed collection measurements using a quartz crystal microbalance (QCM) apparatus. Such method provides differential sputtering yields data which are key pieces of information regarding satellites contamination issues. We also computed the total sputtering yields obtained by this second method, and it appeared that they were much smaller than the ones measured previously by weight loss, specially for PTFE. This suggests that erosion products may be of different types (atoms, molecules) which are not all able to stick on a facing surface.
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