We propose an anisotropic crystal-based line-field dispersive interference ellipsometry, capable of both transmission and reflection measurements. This technique is adept at characterizing the optical polarization properties of transparent materials and is applicable for real-time film thickness monitoring in industrial line-field configurations. Experimental demonstrations include the dynamic line-field birefringent phase of the quarter-wave plate and the Soleil-Babinet compensator in the near-infrared band. The developed method also accurately measured the thickness distribution of a conveyor-based film specimen with thicknesses of 250 nm and 510 nm. A phase stability of 9.5 × 10−4 rad under 200 Hz update rate was demonstrated.
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