The International Simple Glass (ISG) spherical particles were prepared by Ar–H2 radio-frequency (RF) plasma, the effect of experimental parameters on the volatilization and size distribution of spherical particles was studied. The results show that the spherical powders can be obtained by RF plasma. The spheroidized powders (112 μm) have a smaller diameter than starting particles (124 μm). The high spheroidization (98%) was achieved under low flow rate of carry gas and low feed rate. In addition, the volatilization of B2O3 and Na2O are 23.48% and 56.36%, respectively. The higher feed rate and flow rate of carry gas, the lower volatilization of B2O3 and Na2O and well-spheroidization rate. Meanwhile, the particle surface is not completely smooth at low flow rate of carry gas. The distribution of elements was studied by Electro-probe Microanalyzer (EPMA), which shows the distribution of element is nearly homogeneous that provides a possibility for subsequent research.
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