Abstract In this work, a mesoporous zinc oxide containing different concentrations of oxygen vacancies (VO) was controlled synthesized via low temperature annealing. XPS, Raman spectroscopy and electron paramagnetic resonance spectroscopy were employed to investigate the changes of VO concentrations following the increase of annealing temperature. According to the experiment, the highest concentration of VO was obtained at the annealing temperature of 350 °C. The relationship between photoelectrochemical biosensor performance and VO concentration was discussed in detail in terms of electrochemical measurements and VO characterization. Results showed that increasing the VO could result in high carrier intensity, active sites and catalytic rate constant. In addition, the performance toward glucose detection could be improved by increasing VO.