We fabricated ZnO micropatterns by a novel process in an aqueous solution at low temperatures. Photo-patterned self-assembled monolayer with phenyl/OH-surface functional groups was used as a template. Site-selective electroless deposition of ZnO was realized on Pd catalyst adhered only to the phenyl-surfaces. The as-deposited ZnO shows 500–800 nm visible light photoluminescence, which would be related to OH ions introduced during deposition process. Patterned monochromatic cathodoluminescence image was successfully demonstrated for 1 μm-width lines.