Austenite 0Cr18Ni9Ti stainless steel is one of difficult-to-cut materials. It has poor dilling process, especially for micro-hole machining. The main reasons are the tiny drill, poor rigidity, easy to deviation. Moreover, the chip is difficult to discharge, so the drilling force is increased and the drill bit is easy to break, or even it is impossible for micro-hole drilling. In this paper, the vibration drilling process is adopted. The vibration drilling 0Cr18Ni9Ti stainless steel micro-hole process mechanism is researched. The stainless steel micro-hole drilling experiments are conducted. The results show that the vibration drilling can be a better solution for 0Cr18Ni9Ti stainless steel micro-hole processing.