Gas dilution systems are commonly used to generate calibration gas mixtures for secondary gas standards. However, if a gas dilution system is used to generate gas mixtures for primary trace-moisture standards in multiple gas species, difficulty arises; flow control with relative stability of better than 0.009% is required although the relative uncertainty of the best gas flow meter to date is around 0.3%. In this study, we developed a novel gas dilution system using critical flow Venturi nozzles to address this problem. The developed dilution system can measure and control the flow rates of gases in the range of approximately 0.05 l min−1 to 7 l min−1 (when converted to those measured at 101 325 Pa and 273.15 K) with relative stability of better than 0.007%. Using the dilution system, we developed a magnetic suspension balance/diffusion-tube humidity generator capable of generating trace moisture in N2 in the range of approximately 10 nmol mol−1 to 5 µmol mol−1 in amount fraction. The accuracy of the generated trace-moisture standard was verified by measurement with cavity ring-down spectroscopy.
Read full abstract