This paper reports a variable-energy slow positron beam characterisation of the surface oxide films in 310 S stainless steel and 800HT nickel-based alloy exposed to 550 °C supercritical water for 1000–4392 h. The evolution of the oxide layer was depth-profiled using positron beam energies from 0.5 to 20 keV, which enabled a probe of up to 2 mm of the near-surface region. SEM/EDS was used as a complementary characterisation tool to support and comprehend the positron annihilation spectroscopy data. A strong dependency on the positron trapping rate and the effective positron diffusion length on the microstructure of the studied materials enabled us to identify up to three non-bulk layers, which were preliminarily attributed to different oxide layers and Fe/Cr depletion regions. By calculating the effective positron diffusion length in the given multi-layer systems, we obtained the thicknesses of individual layers, which are in good agreement with the EDS analysis.
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