In recent years, highly favorable results have been obtained using low temperature isotropic pyrolytic carbons in prosthetic devices requiring a high degree of thromboresistance. The development of vacuum-deposited carbon coatings was undertaken to extend the application of carbon to geometries and configurations that cannot be fabricated from low temperature isotropic carbon. Vacuum-deposited coatings have been produced on a variety of metallic and polymeric substrates. The different vacuum deposition processes which have been investigated include electron beam gun evaporation using high vacuum, gas scattering and ion- plating conditions. In addition, sputtering processes using ion beams and magnetically confined plasmas were studied. The surface morphology, structure and preferred orientation of the coatings produced by the different processes were characterized by scanning and transmission electron microscopy. Film purity and interfacial characteristics were examined by Auger electron spectroscopy. The scanning electron microscopy study shows that thin carbon films generally have a smooth and featureless surface morphology. However, other surface morphology features are obtained in thicker films, depending on the processing conditions. The transmission electron micrographs show the absence of structure and growth features. Electron diffraction indicates that the films consist of a turbostratic phase and a non-crystalline phase. The apparent crystallite sizes are small, and there is no three-dimensional ordering. Generally, the films are isotropic and consist of relatively pure carbon, with the degree of disorder dependent on the process conditions.