W and W-5wt%Re alloy were irradiated by 50 keV helium ions at RT, 200 °C, 350 °C and 500 °C to investigate the influence of temperature on the microdefects and surface morphology in the sample. The microdefects in the subsurface region and the surface damage caused by irradiation were characterized by Doppler broadening spectroscopy (DBS) of slow positron beam, transmission electron microscope (TEM) and scanning electron microscopy (SEM), respectively. The results show that a large number of vacancy-type defects were produced after helium ions irradiation, especially at 500 °C, the vacancy-type defects of W alloy are higher than that of W-5wt%Re alloy, which indicated that Re restricted the behavior of vacancy-type defects in tungsten to some extent. The surface irradiation damage such as crystal gap enlargement, grain fell off and pores were observed at different irradiation temperatures. Compared with the coral-like structure observed in W, the circular objects and Hilly-gully structure were observed in W-5wt%Re alloy, and both of them increased and grew with the increase of irradiation temperature. It was speculated that the presence of Re led to the difference by analyzing the formation mechanism of the coral-like structure and the Hilly-gully structure.