Positron annihilation techniques have been applied to study the nucleation, growth and annealing of voids and gas bubbles. This technique is extremely powerful for the study of microvoids and microbubbles which are too small to be observed by electron microscopy. The lifetime of a component of positron lifetime spectra determines the size of the voids and the intensity of the component determines the density of voids. From the results of irradiation damage in nickel, copper, aluminum, platinum, Cu-Ni alloy, Cu-B alloy, A1-Li alloy, iron, molybdenum and tantalum, it is concluded that gaseous impurity plays a quite important role for selecting whether bubbles and voids or collapsed vacancy loops are formed. This selection will be probably made at a fairly early stage, i.e., when several vacancies coagulate in a cluster.