Nanosized titania (TiO2) films and powders were prepared from titanium isopropoxide by ultrasonication then ultrasonic aerosol-assisted chemical vapor deposition (UAACVD). X-ray diffraction (XRD), used to study the crystal structure, phase, and crystallite size of TiO2 samples annealed at 500°C, revealed anatase was the main crystalline phase. Scanning electron microscopy and atomic force microscopy revealed the quasi-spherical morphology of the TiO2 nanoparticles; average size distribution was in the range 20–35 nm. Ultraviolet–visible spectroscopy was used to evaluate the photocatalytic activity of the anatase TiO2, on the basis of efficiency of degradation of β-naphthol. Pure TiO2 nanoparticles synthesized by use of sonication–UAACVD then calcination at 500°C enabled effective photodegradation under UV light. This method of synthesis of TiO2 is superior to the reflux–UAACVD method with titanium isopropoxide as precursor.