Silver nanoparticles deposited on quartz substrate are annealed by cold atmospheric plasma jet to tailor the surface plasmon resonance (SPR) of silver nanoparticles. SPR is the unique optical property which arises due to the interaction of electromagnetic waves with the conduction electrons on the metal nanoparticle surface. The collective oscillations of these conduction electrons at specific EM wavelengths leads to strong scattering and absorption. For silver nanoparticles (AgNPs), the SPR occurs in UV-visible region and therefore AgNPs are used in various applications including solar energy harvesting, light emitting diodes, printed optoelectronic devices, and surface enhanced Raman scattering(SERS). The SPR absorbance peak strongly depends on the size, shape and assembly of the metal nanoparticles. The SPR absorbance peak can be tailored by thermal annealing of AgNPs. The annealing or sintering leads to change in mean diameter of nanoparticle due to agglomeration or reduction in the outside oxide layer of nanoparticles and therefore either red or blue shift in SPR is observed. However, thermal annealing is not always desirable, especially for the flexible polymer substrates. In the present work, we demonstrate the efficacy of cold atmospheric plasma annealing to achieve desired thermal annealing effects at room temperature. Silver nanoparticle films were deposited on the quartz substrate by injecting NP aerosol in the flowing argon gas. As deposited AgNP films were annealed by low temperature atmospheric plasma jet for 5 mins, 10 mins and 15 mins. Fig 1(a) shows the optical absorption spectra for un-annealed as well as annealed AgNP films. For un-annealed sample we observed the SPR absorbance peak at 426 nm. This peak was blue shifted by 14 nm, 36 nm and 62 nm for plasma annealed films for 5 min, 10 min and 15 min respectively. The AgNP films were also annealed using rapid thermal processing (RTP) at 100°C, 250°C, and 400°C for 5 min, 10 min and 15min. For all the temperatures, SPR peaks were blue shifted and for 400°C (corresponding the thermal energy of 58 meV) the blue shift values coincided with the values observed for plasma annealed AgNP films at room temperature. The plasma treated AgNP films were used as SERS substrates for Raman scattering studies of cortisol biomolecule. The Raman scattering signal from plasma annealed AgNP film was two times higher than that of bare quartz substrate. Figure 1