Ultrasonic Hot Embossing of polymers is one of the most attractive manufacturing methods of high-quality and complex microparts needed for biological and chemical processes. A little simulation work has been done to study the deformation mechanism and the required load in the Ultrasonic Hot Embossing of polymethyl methacrylate (PMMA). This paper developed a 2D coupled thermo-mechanical finite element model to simulate the forming behavior of the ultrasonic embossing process of PMMA, optimize the mold microfeature corner, and predict the embossing load as well. VDISP ABAQUS subroutine has been used to describe the downward motion of the mold assisted with ultrasonic vibration. The Arbitrary Eulerian-Lagrangian re-meshing technique has been implemented to refine the deformation zone during simulation to avoid divergence due to localized excessive deformation. Embossing load, temperature, stresses, strains, and energy dissipation have been recorded and analyzed. Simulation results revealed that the coupled thermo-mechanical FE Model efficiently captures the deformation behavior and Embossing load. It also proved that a Mold microfeature corner of 20 μm filet radius is recommended to adequately fill out the area around the mold and maintain uniform temperature and strain distributions.
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