Monitoring the temporal structure of an ultra-short electron beam is an indispensable function in order to tune a machine to obtain a highly qualified beam for a recent sophisticated accelerator, such as an X-ray free electron laser (XFEL), and to maintain stable X-ray laser operation. For this purpose, various instruments, such as an HEM11-mode RF beam deflector (RFDEF), a screen monitor (SCM), an electro-optic (EO) sampling method that uses a ZnTe crystal, and a beam position monitor (BPM) have been developed. The SCM that is used to observe the deflected beam image has a position resolution of 2.5 μm, which corresponds to a temporal resolution of 0.5 fs and it is installed at a position 5 m downstream from the RFDEF. The EO sampling method showed the ability to observe an electron bunch length for up to 300 fs (FWHM) at the SCSS test accelerator. The phase reference cavity of the BPM has an additional function of providing beam arrival timing information. A test for the BPM showed temporal fluctuation of 46 fs on the beam arrival timing at the test accelerator. These monitors with high temporal resolutions allow us to achieve the fine beam tuning demanded for the XFEL. The above-mentioned activities are described in this paper as a review article.
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