• HFCVD is used to synthesize UD-MCD, UD-UNCD, UD-MCD/UD-UNCD, BD-MCD, BD-UNCD, BD-MCD/BD-UNCD films on WC-Co substrates. • Growth mechanism of UNCD with high carbon concentration and low gas pressure in hydrogen-rich chemistry are illustrated. • Undoped and boron doped UNCD coatings are firstly applied on WC-Co micro drills to improve the surface smoothness. • Both boron doping and middle layer MCD contribute to the strong adhesive level of UD-MCD/UD-UNCD and BD-MCD/BD-UNCD. • The UD-MCD/UD-UNCD, BD-UNCD and BD-MCD/BD-UNCD coated PCB micro drills show superior cutting performances. 5G printed circuit boards (PCBs), composed of glass fiber, epoxy resin and ceramic, are a kind of difficult-to-machine material. The manufacture of massive high-quality micro holes on 5G PCBs raise high requirements on the tool life and machining precision of PCB micro drills. Chemical vapor deposition (CVD) diamond coatings can be used as effective protective films on PCB micro drills. The surface smoothness and coating-substrate adhesion of diamond coated micro drills are two important factors affecting the drilling performances. Different from previously reported microcrystalline diamond (MCD) or nanocrystalline diamond (NCD) coating types on cutting tools, undoped (UD-) and boron doped (BD-) ultrananocrystalline diamond (UNCD) coatings with higher surface smoothness are firstly applied on PCB micro drills to reduce the friction and cutting resistance and improve the cutting performances while machining PCBs. Moreover, different from the usual argon-rich gas atmosphere for UNCD synthesis, the synthesis mechanisms of UD-UNCD and BD-UNCD with hydrogen-rich atmosphere adopting HFCVD method are clarified. Sufficiently high renucleation rate of diamond crystallites, long mean free path of reactive precursor species and high removal rate of non-diamond carbon phases lead to the successful synthesis of UNCD films. UDMCD, UD-UNCD, UD-MCD/UD-UNCD, BD-MCD, BD-UNCD, and BD-MCD/BD-UNCD, were synthesized on PCB micro drills using HFCVD. The tribological performances and wear mechanisms of these different diamond coatings were studied systematically. The dominant wear mechanism causing tool wear and fracture of diamond coated micro drills in high-speed machining PCBs is abrasive wear. The degree of abrasive wear while machining PCBs are mainly determined by the surface smoothness, surface roughness and coefficient of friction of diamond coatings. The top layer UNCD with tiny grain size leads to the improvement of surface smoothness and tribological properties, which enhance the chip evacuation capacity and reduce the tool wear. Besides, both boron doping and middle layer MCD can contribute to the strong coating-substrate adhesion. Therefore, BD-MCD/BD-UNCD coated micro drill exhibits the best cutting performances while machining PCBs.