The size of ultrafine particles ranges between 1~1000nm, including metal, non-metallic, organic, inorganic and biological powder materials. Because of its inherent surface effect, small size effect and quantum effect, it has special optical properties, thermal properties, magnetic properties and mechanical properties which had been widely used in various industrial fields. Supercritical fluid technology has been used to obtain ultra-fine powder of several kind of materials. This work is focused on the systematic production of ultra-fine powder using RESS and SAS process. A systematic summary is made and different measures adopted according to the related circumstances are presented. We also summarize the effect of the process parameters of RESS and SAS process. The ongoing and more extensive research on mechanism and control measures of size, morphology and size distribution of particle should provide a better understanding of particle formation mechanism and achieve the goal of integrated use of different measures to control particle preparation process in the near future.
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