A significant contribution to the temporal resolution of an ultrafast electron diffraction (UED) instrument is arrival time jitter caused by amplitude and phase variation of radio-frequency (rf) cavities. In this paper, we present a semianalytical approach for calculating rf-induced temporal jitter from klystron and rf cavity parameters. Our approach allows fast estimation of temporal jitter for MeV-UED beamlines and can serve as a virtual timing tool when shot-to-shot measurements of rf amplitude and phase jitters are available. A simulation study for the SLAC MeV-UED instrument is presented, and the temporal resolution of several beamline configurations is compared. Published by the American Physical Society 2025
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