The oxidation of silicon and platinum single crystal faces, of polycrystalline supported catalysts and of some alloy surfaces has been studied by AES and as far as possible by LEED. A comparison of the oxygen Auger spectra obtained during the oxidation process with those found on oxides has been made; it shows that the modification of the fine structure of the oxygen Auger peaks gives some information about the binding state of oxygen. Two different structures, which compete one with the other, are described. In one case, a spectrum where three lines dominate is obtained; in the other case, a “quasi-atomic” spectrum characterized by five features is observed: multiplet splitting in the two-hole final state is predominant. Besides these differences in the fine structure of the Auger spectra one can notice shifts of several eV for the main feature. They have been correlated with the various observed LEED patterns. Physisorption, chemisorption, solution of oxygen in the metal lattice, growth of ordered or amorphous oxides are the different possibilities which are discussed.