Quasioptical grid array technologies can provide low cost, wide bandwidth sources supplying 100–500 mW power levels needed for reflectometric and electron cyclotron imaging of fusion plasmas. Broadband quasioptical overmoded waveguide frequency multiplier grid array systems have been designed, simulated, fabricated, and are under test with a goal of providing Watt level output powers from 50 to 200 GHz. Both 1×8, one-dimensional and 4×4, two-dimensional phased antenna arrays utilizing Schottky varactor loaded transmission lines have been designed, simulated, fabricated, and are being tested. Microelectromechanical systems have been designed and fabricated on silicon wafers with traditional integrated circuit processing techniques, resulting in devices with physical dimensions on the order of a few tens of microns.