AbstractA study of the low‐energy region (below 1. 5 keV) of energy dispersive x‐ray spectra has been carried out. Firstly, because some counting systems do not provide a reliable dead time correction, a new method of dealing with the problem is given. Next, the effects of different positioning of the energy discriminator within the analyser circuitry are discussed with reference to the consequences for light element analysis. Electronic noise counts can present a problem for analysis of x‐rays of less than 300 eV and a straightforward method for noise removal is described. Finally, an unexpected artifact in the spectrum below 500 eV is identified; its size is related to the total number of counts in the spectrum and a practical method of dealing with it is demonstrated. Once the above factors have been taken into account a low energy spectrum is produced, consisting solely of characteristic x‐ray lines and a true continuum background.
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