We have investigated the structure and ferroelectric properties of vinylidene fluoride–trifluoroethylene (VDF–TrFE) copolymer thin films fabricated on amorphous alloy electrodes. Thin films of amorphous Pd–Cu–Si alloys with various compositions were successfully prepared by sputtering deposition. An atomically flat surface resulting from a fully amorphous structure of Pd–Cu–Si was obtained upon achieving a uniform surface of a spin-coated VDF–TrFE copolymer thin film. X-ray diffraction (XRD) measurements revealed that the crystalline structure of the VDF–TrFE copolymer thin films was of ferroelectric β-phase, being independent of the composition and crystalline state of the Pd–Cu–Si alloy. The clearly observed D–E hysteresis loops showed a remanent polarization of 0.075 C/m2 and a coercive field of 90 MV/m at a measurement frequency of 10 Hz for a 50-nm-thick film, which is almost consistent with the results obtained with Pt electrode samples. We also observed the thinning-induced reduction of remanent polarization, which was explained by the depolarization field induced by the surface dead layer in VDF–TrFE copolymer rather than the oxidized layer in Pd–Cu–Si alloy electrode.