Transducer Electrodes Research Articles

"On-plant" wearable electrochemical sensor for atmospheric lead monitoring.

Considering the extremely high toxicity of lead (Pb), early detection of atmospheric Pb levels is paramount for the implementation of preventive measures, to contain sources of emission, to minimize both human and plant exposure and to prevent accumulation in the biosphere. This work demonstrates a wearable "on-plant" sensor for electrochemical Pb detection in atmospheric aerosol samples. The sensor is screen-printed onto a flexible self-adhesive vinyl-based matte substrate which enables its attachment on plant leaves. It features a bismuth/Nafion-coated carbon working electrode transducer covered with a polyvinyl alcohol (PVA) membrane which serves as a passive in-situ gas collection layer and as an electrolyte-containing matrix. The Pb collected at the interface between the sample in the gas phase and the acetate buffer solution (ABS) embedded within the PVA membrane is measured by square wave anodic stripping voltammetry (SWASV). Different steps of the fabrication process were optimized and the detection of on plant leaves was demonstrated. Simulation experiments were conducted with a Pb-containing aerosol sprayed on the leaves to evaluate the effect of various operational parameters such as long-term stability, spraying time, accumulation time, or sensor/leaf bending. The "on-plant" sensor allows remote near real-time monitoring of Pb levels as low as 50μgL-1 in ambient air using a portable miniaturized potentiostat, and can be expanded to other target metals, forming the basis of an early warning system for atmospheric heavy metals exposure.

INNV-34. APPLICATION OF 200 KHZ TUMOR TREATING FIELDS (TTFIELDS) IN PATIENTS WITH INFRATENTORIAL HIGH-GRADE GLIOMA: CASE SERIES

Abstract BACKGROUND 200 kHz Tumor Treating Fields (TTFields) therapy is FDA-approved for supratentorial newly-diagnosed and recurrent glioblastoma. However, reports of its application in patients with infratentorial high-grade glioma (HGG) are rare. Based on computational modeling, the therapeutic field strength (~1 V/cm peak-to-peak) is thought to be achievable for infratentorial HGG. METHODS Two patients with infratentorial HGG received off-label 200 kHz TTFields therapy with the Optune® device (Novocure, Ltd.). To reduce impaired range of motion of the neck, the electrode transducer arrays were “skeletonized” by cutting a portion of the adhesive material surrounding them. Application of the electrode arrays was performed with the neck in flexion, to further promote neck range of motion. Cloth tape was used for reinforcement as necessary. Electrode arrays were changed every 2-3 days. We report the results of patient survival and adverse events. RESULTS Patient 1: 22-year-old man with high-grade diffuse pontine glioma with recurrences and prior treatments (including radiation, temozolomide, lomustine, and dopamine receptor D2 [DRD2] antagonist), tolerated TTFields combined with systemic treatment (initially with a bi-functional DNA alkylating agent; subsequently with temozolomide and bevacizumab) for 5 months with stable disease for 4 months. He experienced grade 1 rash of the neck. Patient 2: 58-year-old woman with diffuse glioma of the brainstem (H3K27M-mutated) with multiple recurrences and prior treatments (including concurrent radiation and temozolomide, and DRD2 antagonist), tolerated TTFields combined with systemic treatment (lomustine and bevacizumab). The TTFields infratentorial layout was iteratively modified with respect to placement of the electrode transducer arrays, for improved tolerability. With the TTFields+systemic combination therapy, the patient was stable for 8 months with no local TTFields-related side effects. CONCLUSIONS We provide initial post-marketing evidence that off-label use of 200 kHz TTFields in infratentorial HGG is safe and feasible. Prospective studies are necessary to validate the efficacy of this approach.

Submersible voltammetric sensing probe for rapid and extended remote monitoring of opioids in community water systems

The intensifying global opioid crisis, majorly attributed to fentanyl (FT) and its analogs, has necessitated the development of rapid and ultrasensitive remote/on-site FT sensing modalities. However, current approaches for tracking FT exposure through wastewater-based epidemiology (WBE) are unadaptable, time-consuming, and require trained professionals. Toward developing an extended in situ wastewater opioid monitoring system, we have developed a screen-printed electrochemical FT sensor and integrated it with a customized submersible remote sensing probe. The sensor composition and design have been optimized to address the challenges for extended in situ FT monitoring. Specifically, ZIF-8 metal–organic framework (MOF)-derived mesoporous carbon (MPC) nanoparticles (NPs) are incorporated in the screen-printed carbon electrode (SPCE) transducer to improve FT accumulation and its electrocatalytic oxidation. A rapid (10 s) and sensitive square wave voltammetric (SWV) FT detection down to 9.9 µgL−1 is thus achieved in aqueous buffer solution. A protective mixed-matrix membrane (MMM) has been optimized as the anti-fouling sensor coating to mitigate electrode passivation by FT oxidation products and enable long-term, intermittent FT monitoring. The unique MMM, comprising an insulating polyvinyl chloride (PVC) matrix and carboxyl-functionalized multi-walled carbon nanotubes (CNT-COOH) as semiconductive fillers, yielded highly stable FT sensor operation (> 95% normalized response) up to 10 h in domestic wastewater, and up to 4 h in untreated river water. This sensing platform enables wireless data acquisition on a smartphone via Bluetooth. Such effective remote operation of submersible opioid sensing probes could enable stricter surveillance of community water systems toward timely alerts, countermeasures, and legal enforcement.Graphical abstract

Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

The lithographically tunable and small size features of Lamb wave resonators (LWRs) take a bright future for their use in high frequency narrow band filters. Resonant frequency drift due to temperature variation has a large impact on the narrower passband and a temperature coefficient of frequency (TCF) closer to 0 can broaden the stable temperature range of the resonator. This paper proposes a method of etching grooves in the area of the piezoelectric layer not covered by the Interdigital transducer (IDT) electrodes to improve the temperature stability of the Lamb resonator. Through the finite element method and theoretical analysis, the phase velocity, group velocity, and TCF dispersion curve of different modes of the resonator with groove structure were determined. The reason for the change of TCF under different normalized thicknesses of AlN was explained through the conversion of the LWR from a contour mode resonator (CMR) to a Cross-Sectional Lamé Mode Resonator. Simulation and test have shown that etching grooves have the effect of reducing TCF by adjusting the electromechanical coupling coefficient. The test shows that 205 nm-depth grooves can lower the TCF of the S0 mode IDT-Open LWR from −13.3 to −5.1 ppm/°C and S1 mode from −36.8 to −9.0 ppm/°C, respectively. The TCF of S0 and S1 mode LWRs decreased by 61.7% and 75.5%, respectively, after 205 nm groove etching. The groove etching method greatly raises the temperature stability of the LWR, enabling Lamb wave filters to operate stably over a wider temperature range.

The analytical model of time-harmonic electric field and impedance spectrum in the multilayered interdigital electrode structure

Accurately determining the time-harmonic electric field and impedance spectrum in the multilayered interdigital electrode (IDE) transducers with lossy dielectrics is essential for the design of the structure, the property estimation of the dielectric, and performance optimization. This paper presents an analytical model of the electric field and impedance within a multilayered interdigitated electrode (IDE) when subjected to alternating excitation through the method of separation of variables (MSV). The equivalent circuit of IDE is established, where the impedance is the parallel of capacitive coupling and resistive coupling between electrodes. The general solutions for the electric field and impedance involving arbitrary numbers and complex permittivities of the dielectric layers are analytically derived. However, due to the approximation of boundary conditions, these physical quantities cannot be accurately obtained by the conventional analytical method using conformal mapping technique (CMT) and partial capacitance technique (PCT). The proposed model exhibits proficiency in generating precise electric field images and impedance values that closely correspond with simulated data, even when accounting for the frequency-dependent characteristics of permittivity and conductivity in lossy dielectrics. Moreover, the approaches to improve the sensitivity of a traditional three-layered IDE-based sensor are demonstrated. For a three-layered IDE-based capacitive sensor, improving the sensitivity can be accomplished through the incorporation of a ground plane at the substrate's bottom and increasing the metallization rate. Conversely, it is recommended to reduce the metallization rate, increase substrate thickness, and remove the ground plane in order to enhance the sensitivity of the IDE-based impedance sensor. The experimental results demonstrate that the proposed model generates outstanding impedance spectra (involving capacitance spectra and resistance spectra) results for various metallization ratios and top layers. This exemplifies the model's potential for predicting, designing, and enhancing a complex multilayered IDE-based transducer to achieve precise and sensitive detection.

Analysis and NDT applications of a gas discharge electroacoustic transducer

In this study, a gas discharge electroacoustic transducer (GDEAT) based on a pulsed electric discharge in the air under atmospheric pressure has been investigated. By evaluating acoustic pressure and recording amplitude-frequency characteristics of membranes, the acoustic characteristic of GDEATs have been obtained in the frequency range from 40 Hz to 4 MHz. The electro-thermo-acoustic processes have been studied in gas discharge systems of an open type where the electrode space is in a direct contact with the ambient. Some features of using the above-mentioned GDEATs in nondestructive testing (NDT) of materials have been demonstrated. It has been shown that, on one hand, the wear of both electrodes and insulation limits a work life of a transducer electrode system, but, from the other hand, this may lead to deposition of micro-particles on the surface of an object under test. The wear of electrode systems was evaluated quantitatively, and the results of the chemical analysis of deposited micro-particles have been presented. The use of a GDEATs for non-contact stimulation of local resonant vibrations in subsurface defects and visualizing vibrations by means of laser dopler vibrometry has been shown in the case of NDT of a glass fiber composite.

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

This paper proposes an improved method to calculate the mutual capacitance between interdigital transducer (IDT) electrodes to enhance the accuracy of the traditional coupling-of-modes (COM) model, which is commonly used to simulate surface acoustic wave (SAW) filters and duplexers. In this method, the boundary element method (BEM) is adopted to obtain the capacitance per unit length in a layered medium, while the partial capacitance (PC) method is used to derive the effective relative permittivity of the multi-layered IDT. Numerical results from commercially available software are provided for comparison with the results calculated using the proposed method. The consistent results verify the validity and accuracy of this method, which also demonstrates significantly faster calculation speed compared to commercially available software. Precise electrical response prediction of a dual-mode SAW (DMS) filter can be achieved by applying this method to the COM model, and this ultra-fast calculation method can also be included in filter design optimization.

Grooving and Absorption on Substrates to Reduce the Bulk Acoustic Wave for Surface Acoustic Wave Micro-Force Sensors.

Improving measurement accuracy is the core issue with surface acoustic wave (SAW) micro-force sensors. An electrode transducer can stimulate not only the SAW but also the bulk acoustic wave (BAW). A portion of the BAW can be picked up by the receiving transducer, leading to an unwanted or spurious signal. This can harm the device's frequency response characteristics, thereby potentially reducing the precision of the micro-force sensor's measurements. This paper examines the influence of anisotropy on wave propagation, and it also performs a phase-matching analysis between interdigital transducers (IDTs) and bulk waves. Two solutions are shown to reduce the influence of BAW for SAW micro sensors, which are arranged with acoustic absorbers at the ends of the substrate and in grooving in the piezoelectric substrate. Three different types of sensors were manufactured, and the test results showed that the sidelobes of the SAW micro-force sensor could be effectively inhibited (3.32 dB), thereby enhancing the sensitivity and performance of sensor detection. The SAW micro-force sensor manufactured using the new process was tested and the following results were obtained: the center frequency was 59.83 MHz, the fractional bandwidth was 1.33%, the range was 0-1000 mN, the linearity was 1.02%, the hysteresis was 0.59%, the repeatability was 1.11%, and the accuracy was 1.34%.

Ternary Holey Carbon Nanohorn/Potassium Chloride/Polyvinylpyrrolidone Nanohybrid as Sensing Film for Resistive Humidity Sensor

The study presents findings on the relative humidity (R.H.) sensing capabilities of a resistive sensor. This sensor utilizes sensing layers composed of a ternary nanohybrid, consisting of holey carbon nanohorn (CNHox), potassium chloride (KCl), and polyvinylpyrrolidone (PVP), with mass ratios of 7/1/2, 6.5/1.5/2, and 6/2/2 (w/w/w). The sensing structure comprises a silicon substrate, a SiO2 layer, and interdigitated transducer (IDT) electrodes. The sensing film is deposited on the sensing structure via the drop-casting method. The sensing layers’ morphology and composition are investigated through Scanning Electron Microscopy (SEM) and RAMAN spectroscopy. The resistance of thin-film sensors based on ternary hybrids increased with exposure to a range of relative humidity (R.H.) levels, from 0% to 100%. The newly designed devices demonstrated a comparable response at room temperature to that of commercial capacitive R.H. sensors, boasting excellent linearity, swift response times, and heightened sensitivity. Notably, the studied sensors outperform others employing CNHox-based sensing layers in terms of sensitivity, as observed through manufacturing and testing processes. It elucidates the sensing mechanisms of each constituent within the ternary hybrid nanocomposites, delving into their chemical and physical properties, electronic characteristics, and affinity for water molecules. Various alternative sensing mechanisms are considered and discussed, including the reduction in holes within CNHox upon interaction with water molecules, proton conduction, and PVP swelling.

Harnessing a Vibroacoustic Mode for Enabling Smart Functions on Surface Acoustic Wave Devices ‐ Application to Icing Monitoring and Deicing

AbstractMicroacoustic wave devices are essential components in the radio frequency (RF) electronics and microelectromechanical systems (MEMS) industry with increasing impact in various sensing and actuation applications. Reliable and smart operation of acoustic wave devices at low costs will cause a crucial advancement. Herein, this study presents the enablement of temperature and mechanical sensing capabilities in a Rayleigh‐mode standing surface acoustic wave (sSAW) chip device by harnessing an acoustic shear‐thickness dominant wave (SD) using the same set of electrodes. Most importantly, this mode is excited by switching the polarity of the sSAW transducer electrodes by simple electronics, allowing for direct and inexpensive compatibility with an existing setup. The method in the emergent topic of surface de‐icing is validated by continuously monitoring temperature and liquid–solid water phase changes using the SD mode, and on‐demand Rayleigh‐wave deicing with a negligible energy cost. The flexibility for adapting the system to different scenarios, and loads and the potential for scalability opens the path to impact in lab‐on‐a‐chip, internet of things (IoT) technology, and sectors requiring autonomous acoustic wave actuators.

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

One approach to extend the acoustic applications of aluminum nitride (AlN) in the GHz frequency range is to take advantage of the piezoelectric performance and high acoustic velocity (∼11 350 m/s) along the c-axis of this material. In particular, in the case of high-frequency micro-electromechanical systems, it should be possible to simplify the construction of resonators by using a-plane AlN-based structures. In the work described in this Letter, a single-crystalline a-plane AlN layer on an r-plane sapphire substrate is obtained by combining sputtering and high-temperature annealing. Based on this non-polar AlN, a resonator with only planar interdigital transducer electrodes is fabricated. Experiments on this resonator reveal simultaneous excitation of an anisotropic Rayleigh surface acoustic wave (SAW) at 2.38 GHz and a laterally excited bulk acoustic wave (LBAW) at 4.00 GHz. It is found that the Rayleigh SAW exhibits outstanding performance, with a quality factor as high as 2458 and great stability under variations in temperature. The LBAW at 4.00 GHz is excited by pure planar interdigitated electrodes without the need for any cavity or bottom electrode structure, thus demonstrating a promising approach to the construction of high-frequency resonators with a relatively simple structure.

Room temperature operating formaldehyde sensor based on n-type ZnO functionalized surface acoustic wave resonator

In this investigation, Surface Acoustic Wave (SAW) formalin gas sensor is explored for low-level formalin gas sensing applications. The formalin gas sensor consists of ST-cut quartz as a base substrate material, interdigitated transducer (IDT) electrodes, reflectors and gas sensing n-ZnO thin film coated on top of the SAW resonator. Nano-structured optimal n-ZnO thin film was deposited as a gas sensing layer. It is noted that the sensor response was not affected by relative humidity and found stable. Formalin gas concentration was established in the controlled process chamber environment. The sensor response was measured at room temperature (25 °C) and relative humidity was 50 % during the experiment. Experimental data shows that return loss peak was shifted towards down side, return loss was better when formalin content (0–8 ppm) was increased in the process chamber. In order to understand, the underlying electrical sensing mechanism, modified Butterworth-Van Dyke (mBVD) equivalent circuit model was developed using Advanced Design System (ADS) software. This model provides the insights about change in electrical behaviour of sensor when it is exposed to relative gas content. The fitted theoretical model follows the experimental data, which indicate the goodness of the mBVD model and curve fitting. The highest frequency down-shift was observed 10.5 kHz due to formalin gas content of 8.0 ppm. Motional arm is mainly influenced by the formalin gas exposure. Motional arm resistance (Rm) and inductance (Lm) was also influenced by the formalin gas content and found to increase by the formalin gas content and mainly accountable for gas sensing behaviour. It is also noted that static arm is not influenced by gas content and only motional arm is accountable for gas sensing behaviour. Highest sensitivity (S) was 1.3125 kHz/ppm and limit of detection (LOD) was 80 ppb. This new kind of formalin sensor is low cost, reliable, robust sensor and highly useful for room temperature operating formalin gas sensor applications.

Through-Holes Design for Ideal LiNbO3 A1 Resonators.

This paper proposes a method to realize ideal lithium niobate (LiNbO3) A1 resonators. By introducing subwavelength through-holes between the interdigital transducer (IDT) electrodes on the LiNbO3 surface, all unfavorable spurious modes of the resonators can be suppressed completely. It is convenient and valid for various IDT electrode parameters and different LiNbO3 thicknesses. Also, this method does not require additional device fabrication steps. At the same time, these through-holes can greatly reduce the suspended area of the LiNbO3 thin film, thus significantly improving the design flexibility, compactness, mechanical stability, temperature stability, and power tolerance of the resonators (and subsequent filters). It is expected to become an important means to promote the practical application of LiNbO3 A1 filters and even all Lamb waves filters.

Methods of Solving Passband Ripples and Sidelobes for Wavelet Transform Processor Using Surface Acoustic Wave Device

This article proposes an approach using surface acoustic wave (SAW) device to decrease passband ripples and sidelobes as two key problems of wavelet transform processors (WTPs). The passband ripples are primarily generated through electrode reflections and transducer end-effects. The proposed method uses unbalanced split-electrode interdigital transducers (IDTs) to prevent electrode reflections. The problem of transducer end-effects is alleviated by attaching SAW absorbers to both ends of the substrate edge, which can effectively absorb the spurious SAW arriving at the edges of the piezoelectric substrate. Moreover, because the radiation energy of bulk acoustic wave (BAW) has a sidelobe distribution, the greater sidelobes are predominantly caused by the BAW radiation. This problem is alleviated by engraving bidirectional slots on the substrate at the back of the WTPs of the unbalanced split-electrode IDTs to suppress the BAW radiation. The experimental results demonstrate that the passband ripples and sidelobes of the WTPs decrease to 0.72 and 6.58 dB, respectively.

Durability of TiAl based surface acoustic wave devices for sensing at intermediate high temperatures

TiAl based surface acoustic wave (SAW) devices, which offer a promising cheap and easy to handle wireless sensor solution for intermediate high temperatures up to 600 °C, were prepared and investigated with respect to their durability. To obtain the devices, Ti/Al multilayers were deposited on high-temperature stable piezoelectric catangasite (CTGS) substrates and structured as electrodes via the lift-off technique. AlNO cover layers and barrier layers at the substrate site served as an oxidation protection. The devices were characterized regarding their electrical behavior by ex-situ measurements of their frequency characteristics after heat treatments up to 600 °C in air. In addition, long-term in situ measurements up to 570 °C were performed to analyze a possible drift of the resonant frequency in dependence on the temperature and time. Scanning electron microscopy of the surfaces of the devices and scanning transmission electron microscopy of cross sections of TiAl interdigital transducer electrode fingers and the contact pads were conducted to check the morphology of the electrode metallization and to reveal if degradation or oxidation processes occurred during the heat treatments.The results demonstrated a sufficient high-temperature stability of the TiAl based devices after a first conditioning of system. A linear dependence of the resonant frequency on the temperature of about −37 ppm/K was observed. In summary, the suitability of TiAl based SAW sensors for long-term application at intermediate temperatures was proven.

Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation.

Surface acoustic wave (SAW)-based acoustofluidic devices have shown broad applications in microfluidic actuation and particle/cell manipulation. Conventional SAW acoustofluidic device fabrication generally includes photolithography and lift-off processes and thus requires accessing cleanroom facilities and expensive lithography equipment. In this paper, we report a femtosecond laser direct writing mask method for acoustofluidic device preparation. By micromachining of steel foil to form the mask and direct evaporation of metal on the piezoelectric substrate using the mask, the interdigital transducer (IDT) electrodes of the SAW device are generated. The minimum spatial periodicity of the IDT finger is about 200 μm, and the preparation for LiNbO3 and ZnO thin films and flexible PVDF SAW devices is verified. Meanwhile, we have demonstrated various microfluidic functions, including streaming, concentration, pumping, jumping, jetting, nebulization, and particle alignment using the fabricated acoustofluidic (ZnO/Al plate, LiNbO3) devices. Compared to the traditional manufacturing process, the proposed method omits spin coating, drying, lithography, developing, and lift-off processes and thus has advantages of simple, convenient, low cost, and environment friendliness.

In Vivo Plant Bio-Electrochemical Sensor Using Redox Cycling.

This work presents an in vivo stem-mounted sensor for Nicotiana tabacum plants and an in situ cell suspension sensor for Solanum lycopersicum cells. Stem-mounted sensors are mechanically stable and less sensitive to plant and air movements than the previously demonstrated leaf-mounted sensors. Interdigitated-electrode-arrays with a dual working electrode configuration were used with an auxiliary electrode and an Ag/AgCl quasi-reference electrode. Signal amplification by redox cycling is demonstrated for a plant-based sensor responding to enzyme expression induced by different cues in the plants. Functional biosensing is demonstrated, first for constitutive enzyme expression and later, for heat-shock-induced enzyme expression in plants. In the cell suspension with redox cycling, positive detection of the enzyme β-glucuronidase (GUS) was observed within a few minutes after applying the substrate (pNPG, 4-Nitrophenyl β-D-glucopyranoside), following redox reactions of the product (p-nitrophenol (pNP)). It is assumed that the initial reaction is the irreversible reduction of pNP to p-hydroxylaminophenol. Next, it can be either oxidized to p-nitrosophenol or dehydrated and oxidized to aminophenol. Both last reactions are reversible and can be used for redox cycling. The dual-electrode redox-cycling electrochemical signal was an order of magnitude larger than that of conventional single-working electrode transducers. A simple model for the gain is presented, predicting that an even larger gain is possible for sub-micron electrodes. In summary, this work demonstrates, for the first time, a redox cycling-based in vivo plant sensor, where diffusion-based amplification occurs inside a tobacco plant's tissue. The technique can be applied to other plants as well as to medical and environmental monitoring systems.

Recent Developments in Electrochemical Sensors for the Detection of Antibiotic-Resistant Bacteria.

The development of efficient point-of-care (POC) diagnostic tools for detecting infectious diseases caused by destructive pathogens plays an important role in clinical and environmental monitoring. Nevertheless, evolving complex and inconsistent antibiotic-resistant species mire their drug efficacy. In this regard, substantial effort has been expended to develop electrochemical sensors, which have gained significant interest for advancing POC testing with rapid and accurate detection of resistant bacteria at a low cost compared to conventional phenotype methods. This review concentrates on the recent developments in electrochemical sensing techniques that have been applied to assess the diverse latent antibiotic resistances of pathogenic bacteria. It deliberates the prominence of biorecognition probes and tailor-made nanomaterials used in electrochemical antibiotic susceptibility testing (AST). In addition, the bimodal functional efficacy of nanomaterials that can serve as potential transducer electrodes and the antimicrobial agent was investigated to meet the current requirements in designing sensor module development. In the final section, we discuss the challenges with contemporary AST sensor techniques and extend the key ideas to meet the demands of the next POC electrochemical sensors and antibiotic design modules in the healthcare sector.

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3.

Low temperature measurement is crucial in deep space exploration. Surface acoustic wave (SAW) sensors can measure temperature wirelessly, making them ideal in extreme situations when wired sensors are not applicable. In this study, 128° YX LiNbO3 was first introduced into low temperature measurements for its little creep or hysteresis in cryogenic environments and affordable price. The finite element method was utilized to raise the design efficiency and optimize the performance of SAW sensors by comparing the performance with different interdigital transducer (IDT) structure parameters, including the height of electrodes, pairs of IDTs, reflecting grid logarithm and acoustic aperture. Once the parameters were changed, a novel design of high-performance SAW temperature sensors based on 128° YX LiNbO3 with double electrode transducers was obtained, of which the Q value could reach up to 5757.18, 4.2-times higher than originally reported. Low temperature tests were conducted, and the frequency responsiveness of SAW sensors was almost linear from -100 °C to 150 °C, which is in good agreement with the simulation results. All results demonstrate that double electrode transducers are considerably efficient for performance enhancement, especially for high-Q SAW sensors, and indicate that LiNbO3 substrate can be a potential high-performance substitute for cryogenic temperature measurements.

Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask

Platinum (Pt) is widely used in MEMS applications due to its inert nature and high temperature stability. In general, Pt is patterned using dry etching methods which require expensive machinery. In this study, we propose wet etching of Pt electrodes of piezoelectric transducers in hot Aqua Regia at 60 °C using a thick photoresist as a masking material. We showed that this method eliminates the need for metal hard mask and subsequent metal stripping, which may not be compatible with other structures on the process wafer. A stack of Si/Ti/Pt was used as a test sample to verify the effectiveness and chemical stability of AZ® 9260 and SPR™ 220-7 type photoresists in hot Aqua Regia. The optimized process was then successfully applied on a wafer with a pre-patterned pulsed laser deposited lead zirconate titanate (PLD-PZT) using SPR™ 220-7 photoresist. The suitability of the etching process was verified using optical imaging and SEM-EDS analysis. An etch resolution of 3.5 μm was achieved for 100 nm thick Pt thin films after 15 min immersion in hot Aqua Regia at 60 °C without any plasma cleaning. Using descum process with Ar plasma beforehand decreased the etching time down to 3:45 min and improved the minimum feature size down to 1 μm. • Hard baked thick photoresists can withstand hot Aqua Regia treatment. • Platinum films are etched with micron level resolution. • Piezoelectric structures are protected with easily removable photoresist mask. • No hard metal masking is required.