Topography Measurements Research Articles

Precipitation, topography, and soil conservation measures determine the spatiotemporal pattern of sediment yield at the regional scale

Exploring the driving effects of control factors on changes in sediment yield from a watershed perspective is of paramount importance for refined watershed management. The objective of this research is to unveil the spatiotemporal variation of sediment yield in the Coarse Sandy Hilly Catchments (CSHC) region from 1956 to 2019 and further investigate the relationship between sediment yield and driving factors. The findings revealed that the mutation years of sediment load (SL) at Toudaoguai and Longmen stations were 1986 and 1996, respectively, with annual SL declining by 66.75 % and 79.04 % after the mutation. Water and sediment discharge at Toudaoguai station exhibited more consistent fluctuations over time, while water and sediment discharge at Longmen station remained relatively consistent before 1967, followed by an entirely inconsistent trend. The spatial pattern of the annual average specific sediment yield (SSY) indicated that the northwest watersheds had a relatively higher erosion rate compared to the southeast. Over time, the SSY of each watershed exhibited a decreasing trend. The SSY showed significant negative correlations with terrace, afforestation, topographic position index (TPI), grass planting (GP), and elevation, while demonstrating significant positive correlations with rainfall indicators and runoff depth. Changes in precipitation, topography, vegetation and engineering measures accounted for 58.5 % of the variance in SSY. The total impact of precipitation on SSY change was positive (standard path coefficient (SPC) = 0.567, P < 0.01), whereas the total impact of topography, vegetation measures, and engineering measures on SSY change was negative (SPC = -0.282, −0.231, and −0.087, respectively). This study quantified the impact of different types of controlling factors on sediment yield at the watershed level. The insights provided by these results can contribute to sustainable watershed management and the optimal allocation of soil and water conservation measures (SWCMs).

Evaluation of High-Frequency Measurement Errors from Turned Surface Topography Data Using Machine Learning Methods.

Manufacturing processes in industry applications are often controlled by the evaluation of surface topography. Topography, in its overall performance, includes form, waviness, and roughness. Methods of measurement of surface roughness can be roughly divided into tactile and contactless techniques. The latter ones are much faster but sensitive to external disturbances from the environment. One type of external source error, while the measurement of surface topography occurs, is a high-frequency noise. This noise originates from the vibration of the measuring system. In this study, the methods for reducing high-frequency errors from the results of contactless roughness measurements of turned surfaces were supported by machine learning methods. This research delves into optimizing filtration methods for surface topography measurements through the application of machine learning models, focusing on enhancing the accuracy of surface roughness assessments. By examining turned surfaces under specific machining conditions and employing a variety of digital filters, the study identifies the Gaussian regression filter and spline filter as the most effective methods at a 22.5 µm cut-off. Utilizing neural networks, support vector machines, and decision trees, the research demonstrates the superior performance of SVMs, achieving remarkable accuracy and sensitivity in predicting optimal filtration methods.

The effect of transepithelial corneal collagen cross-linking treatment on optical quality of the cornea in keratoconus: 12-month clinical results.

To evaluate the effect of transepithelial corneal collagen crosslinking (CXL) treatment on the optical performance of the cornea at 12-month follow-up after CXL in patients with progressive keratoconus. One hundred and ten eyes of 67 patients were included. The following corneal optical aberrations over the 4-mm-diameter pupil were recorded via Sirius dual-scanning corneal tomography: total, anterior and posterior amount of corneal higher order aberrations [HOAs], vertical coma, horizontal coma, vertical trefoil, oblique trefoil, and spherical aberration, and Strehl ratio of point spread function (PSF). There were significant improvements in mean root mean square error values for corneal total HOA, total coma, anterior HOA, anterior coma, and vertical coma following CXL (P > 0.05, for all). No significant changes were found in the posterior aberometric parameters.PSF value did not change after CXL (P > 0.05). The corneal topographic measurements not revealed a change in the mean simulated keratometry-1, simulated keratometry-2, and maximum keratometry compared with the baseline measurements (P > 0.05, for all). At 12months, there was a significant improvement in the uncorrected (UCVA) and best corrected (BCVA) visual acuity (P < 0.001, both). Most corneal aberrations correlated significantly with postoperative BCVA, but changes in HOAs were not statistically associated with improvements in visual acuity. Transepithelial CXL was effective in stabilizing the keratometric indices and improving the most corneal aberrations in keratoconic eyes 1year after the procedure. While the healing effect on aberrations after CXL was in total and anterior parameters, no significant changes were observed in the posterior surface. In addition, it was observed that transepithelial CXL treatment did not cause a significant change in PSF distribution data.

ИНВЕНТАРИЗАЦИЯ ЗЕМЕЛЬНЫХ УЧАСТКОВ НА ОСНОВЕ ГЕОДЕЗИЧЕСКОГО ОБОСНОВАНИЯ КОМПЛЕКСНЫХ КАДАСТРОВЫХ РАБОТ СЕЛА БАЙКАЛОВО СВЕРДЛОВСКОЙ ОБЛАСТИ

In this paper, the analysis of the results of cadastral works on the sections of the map of the village of Baykalovo is carried out. Cadastral work includes topographic and geodetic measurements, land assessment and cadastral planning. Geoinformation systems and specialized programs were used for the analysis. It is shown that residential buildings and a warehouse area prevail on the map sections. Digitized sections of the map were used for data analysis. The analysis of the correspondence of these cadastral documents to the actual situation on the ground was carried out. It is shown that the analysis of the results of cadastral works is an important tool for identifying errors and inaccuracies in cadastral data. In addition, the data and the difference in the areas of different zones on the map sections are presented. These data allow us to assess the differences between the actual characteristics of the objects and the data recorded in the cadastral documents.

Optical path optimization of chromatic line confocal displacement sensor for high resolution and wide range.

This study introduces the optical path-optimized dual-grating chromatic line confocal imaging (DG-LCI) technique for high-resolution and wide-range surface topography measurements. Chromatic line confocal imaging (LCI) finds extensive applications in high-speed 3D imaging of surface morphology, roughness analysis in industrial production, and quality inspection. A key advantage of LCI is its ability to achieve a large depth of focus, enabling the imaging system to measure a wide range in the Z direction. However, the challenge lies in the trade-off between the measurement range and resolution. Increasing the measurement range reduces the resolution, making it unsuitable for precise measurements required in industrial processing. Conversely, enhancing the resolution limits the measurement range, thereby sacrificing the advantage of LCI systems' broad measurement capabilities. Addressing this limitation, we propose a dual optical path dual-grating structure using a simplified and ingenious optical path optimization design. This design overcomes the challenge of sacrificing the millimeter-level measurement range while simultaneously improving the resolution. Rigorous simulations and experiments validate the effectiveness and validity of our proposed method.

3D Topographical Scanning for the Detection of Osteoporosis.

Osteoporosis is associated with greater risk of fracture, which can lead to increased morbidity and mortality. DEXA scans are often inaccessible for patients, leaving many cases of osteoporosis undetected. A portable 3D topographical scan offers an easily accessible and inexpensive potential adjunct screening tool. We hypothesized that 3D scanning of arm and calf circumference and volume would correlate with DEXA T-scores. 96 female patients were enrolled. Patients were consented and completed a topographical scan of bilateral arms and lower legs with a mobile 3D scanner for arm and calf circumference and volume in clinic. Patient charts were then retrospectively reviewed for DEXA T-scores. Forearm DEXA T-score was positively correlated with arm circumference (r = 0.49, p<0.01), arm volume (r=0.62, p<0.01), and calf volume (r=0.47, p<0.01). Femoral neck DEXA T-score was positively correlated with calf circumference (r=0.36, p<0.01) and calf volume (r=0.36, p<0.01). Our results showed significant correlations between DEXA T-scores and topographical measurements from mobile device acquired 3D scans, although these were in the "moderate" range. Mobile device-based 3D scanning may hold promise as an adjunct screening tool for osteoporosis when DEXA scanning is not available or feasible for patients, although further studies are needed to elucidate the full potential of its clinical utility. At a minimum, identifying a patient as high risk may promote earlier diagnostic DEXA scanning.

UAV Imagery for Measuring Large Wood Volume and Distribution: Ground Truthing Results and Sources of Error

abstract: UAV imagery offers great potential in determining precise environmental measurements. This study identifies and quantifies errors and their causes/sources between UAV imagery- and field-derived measurements of large wood (LW) and cross-sectional valley topography in several forested headwater stream valleys in the Ozark Highlands, Missouri. UAV imagery was collected at six sites following best practices for producing high resolution orthophotos and elevation models through Structure-from-Motion photogrammetry. Field-based measurements of LW were completed along 5 m wide valley cross-sections in which all LW &gt; 1 m in length and 0.1 m in diameter were recorded. Topographic surveys were performed along the centerlines of the LW transects. The same assessments were performed using UAV imagery and ArcGIS. Our sites showed high (&gt;= 0.85) R2 values between field and UAV-GIS topographic surveys. Differences between measurements of LW dimensions tended to be larger with R2 ranging from 0.42 to 0.88. Overall 78 percent of standing trees and 60 percent of LW pieces were identified in the UAV imagery. The main source of detection and measurement error was due to vegetation/canopy cover. This study furthers our understanding of the applications and limitations of UAV derived data for environmental assessments.

The use of Enhanced Vegetation Index for assessing access to different types of green space in epidemiological studies

BackgroundExposure to green space can protect against poor health through a variety of mechanisms. However, there is heterogeneity in methodological approaches to exposure assessments which makes creating effective policy recommendations challenging.ObjectiveCritically evaluate the use of a satellite-derived exposure metric, the Enhanced Vegetation Index (EVI), for assessing access to different types of green space in epidemiological studies.MethodsWe used Landsat 5–8 (30 m resolution) to calculate average EVI for a 300 m radius surrounding 1.4 million households in Wales, UK for 2018. We calculated two additional measures using topographic vector data to represent access to green spaces within 300 m of household locations. The two topographic vector-based measures were total green space area stratified by type and average private garden size. We used linear regression models to test whether EVI could discriminate between publicly accessible and private green space and Pearson correlation to test associations between EVI and green space types.ResultsMean EVI for a 300 m radius surrounding households in Wales was 0.28 (IQR = 0.12). Total green space area and average private garden size were significantly positively associated with corresponding EVI measures (β = < 0.0001, 95% CI: 0.0000, 0.0000; β = 0.0001, 95% CI: 0.0001, 0.0001 respectively). In urban areas, as average garden size increases by 1 m2, EVI increases by 0.0002. Therefore, in urban areas, to see a 0.1 unit increase in EVI index score, garden size would need to increase by 500 m2. The very small β values represent no ‘measurable real-world’ associations. When stratified by type, we observed no strong associations between greenspace and EVI.ImpactIt is a widely implemented assumption in epidiological studies that an increase in EVI is equivalent to an increase in greenness and/or green space.We used linear regression models to test associations between EVI and potential sources of green reflectance at a neighbourhood level using satellite imagery from 2018.We compared EVI measures with a ‘gold standard’ vector-based dataset that defines publicly accessible and private green spaces.We found that EVI should be interpreted with care as a greater EVI score does not necessarily mean greater access to publicly available green spaces in the hyperlocal environment.

Determining sediment deposition dynamics influenced by check dams in a semi‐arid mountainous watershed

AbstractSemi‐arid environments are characterized by infrequent large magnitude rainfalls that produce flash flood events with high sediment concentration. Control structures such as check dams are widely used in this environment for mitigation. However, their impact on the overall sediment balance of watersheds, particularly those severely affected by anthropogenic activity, is sparsely documented. This study used topographic measurements, sediment analysis, and fallout isotope techniques to assess the effectiveness and service life of 18 rock and masonry check dams that were constructed in the 1930s for controlling sediment fluxes in an 11 ha mountainous watershed in southern Arizona. All of the dams are currently filled with sediment resulting in reduction of local channel gradients by 35 to 71% to between 0.04 and 0.28 depending on location within the reach. Sedimentation occurred over multiple decades at a relatively slow average rate of 0.59 t ha−1 y−1 indicating low instantaneous retention efficiency. The smaller headwater dams were filled soon after construction; however, their share of the overall storage capacity was minor. Although evaluation of 137Cs was an effective method for dating sediment, the 210Pb dating method was not satisfactory because of sediment sorting effects and complex deposition patterns. The abundance of similar control structures in the region points to the opportunity to better understand the process impacts of check dams over multiple decades to inform planning and design of their use in future mitigation projects.

Measurement Studies Utilizing Similarity Evaluation between 3D Surface Topography Measurements

In the realm of quality assurance, the significance of statistical measurement studies cannot be overstated, particularly when it comes to quantifying the diverse sources of variation in measurement processes. However, the complexity intensifies when addressing 3D topography data. This research introduces an intuitive similarity-based framework tailored for conducting measurement studies on 3D topography data, aiming to precisely quantify distinct sources of variation through the astute application of similarity evaluation techniques. In the proposed framework, we investigate the mean and variance of the similarity between 3D surface topography measurements to reveal the uniformity of the surface topography measurements and statistical reproducibility of the similarity evaluation procedure, respectively. The efficacy of our framework is vividly demonstrated through its application to measurements derived from additive-fabricated specimens. We considered four metal specimens with 20 segmented windows in total. The topography measurements were obtained by three operators using two scanning systems. We find that the repeatability variation of the topography measurements and the reproducibility variation in the measurements induced by operators are relatively smaller compared with the variation in the measurements induced by optical scanners. We also notice that the variation in the surface geometry of different surfaces is much larger in magnitude compared with the repeatability variation in the topography measurements. Our findings are consistent with the physical intuition and previous research. The ensuing experimental studies yield compelling evidence, affirming that our devised methods are adept at providing profound insights into the multifaceted sources of variation inherent in processes utilizing 3D surface topography data. This innovative framework not only showcases its applicability but also underlines its potential to significantly contribute to the field of quality assurance. By offering a systematic approach to measuring and comprehending variation in 3D topography data, it stands poised to become an indispensable tool in diverse quality assurance contexts.

Topography characterization of friction pairs during the real-time wear process in dry condition

At present, the prediction of wear failure is often based on temperature, friction coefficient, vibration, and other single or a few macroscopic parameters to judge the contact condition of the friction pairs. However, there are still deviations between the measured results and the actual situation. In the digital twin system for studying friction and wear phenomena, in-situ measurement and characterization of topography of friction pairs is a challenge problem which does not exist in other procedural twin systems. This paper investigates the relationship between in-situ measured macroscopic parameters and topographical parameters. First, the dynamic relationship between friction coefficient and fractal parameters is derived from the view of a microscopic contact, and the wear periods are determined based on the dynamic changes of fractal parameters. The derived friction-fractal formula is based on mechanical deformation and the Majumdar and Bhushan rough surface contact model, avoiding the assumptions based on specific wear mechanisms, then having the universal property. Second, the experimental verification is carried on which demonstrates good correspondence between the obtained topographical parameters based on the friction-fractal formula with the experimental results. The obtained friction-fractal formula provides a theoretical basis for predicting and analyzing the wear status of friction pairs in the critical equipment and supports the real-time contact state characterization of the friction pairs in the digital twin system.

Spatial downscaling of SMAP radiometer soil moisture using radar data: Application of machine learning to the SMAPEx and SMAPVEX campaigns

This study developed a random forest approach for downscaling the coarse-resolution (36 km) soil moisture measured by The National Aeronautics and Space Administration (NASA) Soil Moisture Active Passive (SMAP) mission to 1 km spatial resolution, utilizing airborne remotely sensed data (radar backscatter and radiometer retrieved soil moisture), vegetation characteristics (normalized difference vegetation index), soil properties, topography, and ground soil moisture measurements from before the launch of SMAP for training a random forest model. The 36 km SMAP soil moisture product was then downscaled by the trained model to 1 km resolution using the information from SMAP. The downscaled soil moisture was evaluated using airborne retrieved soil moisture observations and ground soil moisture measurements. Considering the airborne retrieved soil moisture as a reference, the results demonstrated that the proposed random forest model could downscale the SMAP radiometer product to 1 km resolution with a correlation coefficient of 0.97, unbiased Root Mean Square Error of 0.048 m3 m−3 and bias of 0.016 m3 m−3. Accordingly, the downscaled soil moisture captured the spatial and temporal heterogeneity and demonstrated the potential of the proposed machine learning model for soil moisture downscaling.

Dual-wavelength Fourier ptychographic microscopy for topographic measurement.

Topographic measurements of micro- or nanostructures are essential in cutting-edge scientific disciplines such as optical communications, metrology, and structural biology. Despite the advances in surface metrology, measuring micron-scale steps with wide field of view (FOV) and high-resolution remains difficult. This study demonstrates a dual-wavelength Fourier ptychographic microscopy for high-resolution topographic measurement across a wide FOV using an aperture scanning structure. This structure enables the capture of a three-dimensional (3D) sample's scattered field with two different wavelength lasers, thus allowing the axial measurement range growing from nano- to micro-scale with enhanced lateral resolution. To suppress the unavoidable noises and artifacts caused by temporal coherence, system vibration, etc., a total variation (TV) regularization algorithm is introduced for phase retrieval. A blazed grating with micron-scale steps is used as the sample to validate the performance of our method. The agreement between the high-resolution reconstructed topography with our method and that with atomic force microscopy verified the effectiveness. Meanwhile, numerical simulations suggest that the method has the potential to characterize samples with high aspect-ratio steps.

One-Year Results of a Phase I/II Randomized, Double-Masked, Placebo-Controlled Study of Processed Amniotic Fluid Drops After PRK.

The aim of this study was to evaluate the 1-year outcomes of using processed amniotic fluid (pAF) postoperatively after photorefractive keratectomy (PRK). Sixty-one participants were randomized to receive either placebo or pAF drops. The drops were instilled 4 times daily for 1 week after PRK along with routine postoperative medications. The primary outcome measures included uncorrected visual acuity, topographic corneal irregularity measurement, and surface staining over 1 year. A statistically significant difference in uncorrected distance visual acuity between the placebo and treatment groups was seen at 1 month post-PRK, with a visual advantage evident in the pAF group. A suggestive difference in corneal irregularity measurement was also seen between the placebo and treatment groups at 1 month postsurgery, with less irregularity noted in the pAF group. No differences in uncorrected distance visual acuity or corneal irregularity measurement were found at 3, 6, and 12 months. There was also no significant difference in corneal staining scores between the 2 groups at any of the measured time points. This 1-year study evaluating the safety and efficacy of pAF as an additional postoperative topical medication after PRK demonstrated that pAF offered a mild visual advantage at 1 month post-PRK. There were no late adverse events, and the intervention proved safe at 1 year.

3D Back Contour Metrics in Predicting Idiopathic Scoliosis Progression: Retrospective Cohort Analysis, Case Series Report and Proof of Concept.

Adolescent Idiopathic Scoliosis is a 3D spinal deformity commonly characterized by serial radiographs. Patients with AIS may have increased average radiation exposure compared to unaffected patients and thus may be implicated with a modest increase in cancer risk. To minimize lifetime radiation exposure, alternative imaging modalities such as surface topography are being explored. Surface topography (ST) uses a camera to map anatomic landmarks of the spine and contours of the back to create software-generated spine models. ST has previously shown good correlation to radiographic measures. In this study, we sought to use ST in the creation of a risk stratification model. A total of 38 patients met the inclusion criteria for curve progression prediction. Scoliotic curves were classified as progressing, stabilized, or improving, and a predictive model was created using the proportional odds logistic modeling. The results showed that surface topography was able to moderately appraise scoliosis curvatures when compared to radiographs. The predictive model, using demographic and surface topography measurements, was able to account for 86.9% of the variability in the future Cobb angle. Additionally, attempts at classification of curve progression, stabilization, or improvement were accurately predicted 27/38 times, 71%. These results provide a basis for the creation of a clinical tool in the tracking and prediction of scoliosis progression in order to reduce the number of X-rays required.

High-precision and high-speed surface topography measurement method of microstructures based on laser scanning transverse differential confocal

The manufacturing of microstructured devices requires higher performance regarding the increasing development of finer structures and more complex structural shapes, which poses a challenge for existing measurement techniques in terms of anti-scattering, high-precision and high-speed. Accordingly, this study proposes a new technology for surface topography measurement of microstructures based on laser scanning transverse differential confocal (LSTDCM), which inserts a D-shaped aperture into the existing confocal system, and performs split-focal spot detection on the focal plane. This method exhibits improved axial resolution by performing differential phase subtraction of the front- and back-focal signals to obtain a highly sensitive axial response signal. Further normalization of the transverse differential confocal signal eliminates the multiplicative noise of the system, avoids the impact of changes in roughness on the measurement results, and achieves an anti-scattering measurement. The linear region of the axial response signal around the zero-crossing point were used to achieve a “non-axial scanning” height measurement, which was combined with high-speed beam lateral scanning to achieve a high-speed areal topography measurement. Theoretical analysis and experimental results indicate that, for samples with height changes within the linear region of axial response, the method can complete areal topography measurement in 1.7 s with the axial resolution of 1 nm and the measurement range of 128 × 128 μm. A microstructured device processed using a nanoform single-point diamond machine tool and a semiconductor wafer were employed in the application validation experiment. And achieve a wide range stitching measurement of 1 mm × 1 mm under a 100 × objective along with the transverse scanning stage. The measurement efficiency is about three times higher than that of Olympus OLS4100 confocal microscope. The method provides a new and effective technical approach that is not limited by the surface roughness and complex structure of the tested devices, and can achieve high-precision as well as high-speed optical nondestructive measurement without moving the tested device. Thus, this work is expected to has important practical applications in the field of ultra-precision measurement.

Influence of Flight Altitude and Surface Characteristics on UAS-LiDAR Ground Height Estimate Accuracy in Juncus roemerianus Scheele-Dominated Marshes

Management and monitoring of vulnerable coastal marshes rely on accurate ground height estimates. However, marsh surface characteristics such as vegetation and water presence complicate aerial remote sensing of the ground. Towards developing an improved understanding and techniques for these remote sensing efforts, this study established relationships among data collection flight altitude, surface characteristics, and ground height estimate accuracy within Juncus roemerianus Scheele-dominated marshes. Uncrewed Aerial System (UAS) Light Detection and Ranging (LiDAR) sampling was conducted at five altitudes for five marsh sites and one local control site. Survey-grade topographic measurements and marsh surface characteristics were recorded at each site for comparison. Root Mean Square Error (RMSE) and linear mixed-effects modeling were used to quantify relationships among vertical error, altitude, and surface characteristics. For low (24–72 m) and high (96–120 m) altitudes Above Ground Level (AGL), the RMSE values were 49 cm and 17 cm, respectively. Despite this appreciable improvement in accuracy with increasing flight altitude, point density values of these datasets limit applications. Linear mixed-effects modeling further emphasized the complex relationships between sensor footprint size, surface characteristics, and ground height estimates. These findings have direct implications for elevation modeling and monitoring efforts of frequently inundated, coastal marshes.

Analysis of Cytokine and Chemokine Level in Tear Film in Keratoconus Patients before and after Corneal Cross-Linking (CXL) Treatment.

Keratoconus (KC) is a degenerative corneal disorder whose aetiology remains unknown. The aim of our study was to analyse the expressions of cytokines and chemokines in KC patients before and after specified time intervals after corneal cross-linking (CXL) treatment to better understand the molecular mechanisms occurring before and after CXL in KC patients process of corneal regeneration.; Tear samples were gathered from 52 participants immediately after the CXL procedure and during the 12-month follow-up period. All patients underwent a detailed ophthalmological examination and tear samples were collected before and after CXL at regular intervals: 1 day before and after the surgery, at the day 7 visit, and at 1, 3, 6, 9, and 12 months after CXL. The control group consisted of 20 healthy people. 10 patients were women (50%) and 10 were men (50%). The mean age was 30 ± 3 years of age. Tear analysis was performed using the Bio-Plex 3D Suspension Array System. Corneal topography parameters measured by Scheimpflug Camera included: keratometry values (Ks, Kf), PI-Apex, PI-Thinnest, Cylinder.; All the 12 months post-op values of the KC patients' topographic measurements were significantly lower than the pre-op. As for the tear cytokine levels comparison between the patient and control groups, cytokine levels of TNF-α, IL-6, and CXCL-10, among others, were detected in lower amounts in the KC group. The pre-op level of IL-6 exhibited a significant increase the day after CXL, whereas comparing the day after the procedure to 12 months after CXL, this showed a significant decrease. Both TNF-α and IL-1 showed a significant decrease compared to the day before and after CXL. We observed significantly higher levels of IL-1β, IL-10, IFN-γ and TNF-α in moderate and severe keratoconus than in mild keratoconus (p < 0.05). We also demonstrated a statistically significant positive correlation between both pre-op and 12 months after CXL TNF-α, IFN-γ, IL-6 and Ks and Kf values (p < 0.05, r > 0); Alterations of inflammatory mediators in tear fluid after CXL link with topographic changes and may contribute to the development and progression of KC.

Characterization of electromigration-induced short-range stress development in Al(0.25 at. % Cu) conductor line

Scanning x-ray microbeam topography and fluorescence experiments were conducted in situ to study the electromigration behavior of a 0.5 μm thick, 10 μm wide, and 200 μm long Al(0.25 at. % Cu) conductor line with 1.5 μm-thick SiO2 passivation on a single crystal Si substrate. The strain sensitivity of x-ray topography measurement allowed detailed examination of the electromigration-induced stress distribution and evolution in the conductor line in response to the depletion of Cu solute early in the electromigration process. Upon electromigration at 0.4 MA/cm2 and 303 °C, a short-range stress gradient was quickly induced by Al migration in the Cu-depleted cathode region to counteract further Al flow. The stress gradient was fully developed during the 5.3 h incubation time, extending over the critical Blech length of about 66 μm from the cathode end. Plastic deformation then occurred at the downstream end of the Cu-depleted region. The preferential electromigration of Cu did not cause detectable stress change outside the Cu-depleted region, except for the significant stress development from the Al2Cu precipitation at the anode end which appeared to initiate the fracture in the passivation. Preliminary finite difference modeling was undertaken to simulate the experimental observations, from which important parameters dictating electromigration in Al(Cu) line were extracted: an apparent effective valence of −5.6 and −1.9 for Cu and Al in Al(Cu), respectively, and a critical Cu concentration of 0.16 at. % above which Al grain boundary diffusion is effectively blocked.

Phase Retrieval Algorithm for Surface Topography Measurement Using Multi-Wavelength Scattering Spectroscopy

We are currently developing a high-precision and wide-range in-process surface topography measurement system using the laser inverse scattering method. In the laser inverse scattering method, a monochromatic plane wave is illuminated perpendicular to the target surface and the surface topography is measured by retrieving the phase distribution of the reflected light. However, the dynamic range of this method is limited to the sub-micrometer range because of phase wrapping during phase retrieval. In this paper, we propose a laser inverse scattering method using a multi-wavelength light source based on the fact that the phase of light is inversely proportional to the wavelength with the propagation distance as a coefficient. We also constructed a surface profilometer based on the proposed method and measured the profile of a single rectangular groove with a width of 50 µm and a depth of 2 µm. The dimensions of the measured profiles agree well with the nominal dimensions of the rectangular groove.