The accurate determination of the post-dilution concentration of biological buffers is essential for retaining the necessary properties and effectiveness of the buffer to maintain stable cellular environments and optimal conditions for biochemical reactions. In this work, we introduce a silicon-based impedance chip, which offers a rapid and reagent-free approach for monitoring the buffer concentrations after dilution with deionized (DI) water. The impedance of the impedance chip is measured, and the impedance data are modeled using a multiparameter equivalent circuit model. We investigated six aqueous biological buffers with pH values above and below the physiological pH for most tissues (pH ~ 7.2-7.4) following dilution with DI water by factors of 2.0, 10.0, 20.0, 100.0, and 200.0. The impedance measurement is then performed for the frequency spectrum of 40 Hz to 1 MHz. From the interpretation of the impedance measurement using the multiparameter equivalent circuit model, we report a buffer-sensitive equivalent circuit parameter RAu/Si of the silicon-based impedance chip showing a linear trend on a logarithmic scale with the buffer concentration change after dilution. The parameter RAu/Si is independent of the buffer pH and the added volume. The results demonstrate the efficacy of the silicon-based impedance chip as a versatile tool for precise post-dilution concentration determination of diverse biologically relevant buffers. The presented impedance chip offers rapid, accurate, and reliable monitoring, making it highly suitable for integration into automated liquid-handling systems to enhance the efficiency and precision of biological and chemical processes.