The segregation of W impurities at the TiC(001) surface has been investigated by using impact collision ion scattering spectroscopy and Auger electron spectroscopy. The topmost layer of TiC(001) is strongly enriched with W accompanied by carbon vacancies (20–25%) in their nearest neighbors, while no marked enrichment of W occurs in the deeper layers. The oxygen is incorporated by the (001) surface irrespective of the existence of W segregants, whereas its uptake rate is moderately enhanced by W, due probably to oxygen diffusion into the bulk mediated by the carbon vacancies.