For improving the bioactivity and biocompatibility of metals for medical applications, anatase titania layers were synthesized on Ti, Ti-6Al-4V and NiTi shape memory alloy (SMA) using the H 2 O 2 -oxidation and hot water aging treatment method at 80 °C. The thickness of the titania layers on Ti, Ti-6Al-4V and NiTi SMA was 7.43 ± 0.93 μm, 3.14 ± 0.38 μm and 4.04 ± 0.25 μm, respectively. X-ray diffraction (XRD) and transmission electron microscopic (TEM) analysis indicated that the titania layers formed were poorly crystalline anatase. Fourier transform infrared spectroscopy (FTIR) suggested that abundant Ti–OH functional groups were produced on titania, which could improve bioactivity of the metals. In addition, the titania layer formed on Ti substrate was shown to contain more molecularly chemisorbed water and Ti–OH functional groups than those on Ti-6Al-4V and NiTi SMA. Atomic force microscopic (AFM) results showed that the surface roughness values of metal samples depended on the scanning size and that surface roughness of samples significantly increased after the H 2 O 2 -oxidation and hot water aging treatment for all three metals. Compared to Ti-6Al-4V and NiTi SMA, the H 2 O 2 -treated and aged Ti samples exhibited the roughest surface. The wettability of samples was evaluated through water contact angle measurements. After the H 2 O 2 -oxidation treatment, the three metals exhibited high hydrophilicity. The bonding strength of titania layers on Ti, Ti-6Al-4V and NiTi was also investigated. Potentiodynamic polarization tests indicated that the corrosion resistance of H 2 O 2 -treated and aged Ti, Ti-6Al-4V and NiTi SMA was significantly improved due to the titania layer formation.