Raman spectra and wafer bending of encapsulated with films were observed. The stresses which are estimated from wafer bending by the Timoshenko relation depend on the thickness of encapsulated films. The changes in Raman spectra also depend on the film thickness. There is good correlation between the variation of the ratio of peak heights of longitudinal optical to coupled plasmon‐longitudinal optical modes in the Raman spectra, (LO/L‐), and the variation of stress deduced from wafer bending. The variation of the LO/L‐ modes with film thickness was explained by the change in space charge layer thickness and disordering by inhomogeneous strain.