The L10 CoPt films with (001) preferred orientation are achieved by fabricating on the glass substrates and post annealing at 600°C for 30min. The preferred orientation of [ZrO2/CoPt]n/Ag films dependence of the Ag underlayer thickness, ZrO2 and CoPt interlayer thickness is investigated. A large perpendicular magnetic anisotropy and a nearly perfect L10 CoPt (001) texture are obtained in the [ZrO2 (3nm)/CoPt (5nm)]3/Ag (10nm) film. The existence of ZrO2 plays an important role in reducing the intergranular interactions and in determining the size of CoPt grains. Magnetic reversal in textured CoPt films are close to a Stoner–Wolfarth rotation.