Thick Silicon Research Articles

Ultrathin tunable UWB metasurface absorber design by exciting plasmonic modes in bilayer graphene stack

This work presents a graphene-based ultra-wideband (UWB) tunable metasurface absorber (MSA) consisting of top patterned graphene (Gpat) and bottom continuous graphene (Gcont) separated by a 2 μm thick silicon dioxide (SiO2) substrate. An absorptivity (Af) ≥ 90 % from 0.1 to 14 THz (fractional bandwidth = 197.2 %) has been achieved in three steps: (i) Fabry-Perot cavity mode has been generated near 0.1 THz using bilayer graphene stack, (ii) multiple plasmonic modes have been excited by engraving resonant slots on Gpat and (iii) plasmonic coupling strength has been enhanced between Gpat and Gcont by adjusting SiO2 substrate's thickness. The excited plasmonic modes show high absorption due to the generation of localized surface plasmon polariton (LSPP) waves. The fourfold symmetry in design nullifies the effect of the polarization angle (ϕ). Interestingly, the orthogonal modes' excitation helps to achieve similar Af response under both transverse electric and transverse magnetic polarizations for incidence angle (θ) up to 60°. Further, an effective DC biasing mechanism has been devised to tune the chemical potential (μc) of the interconnected Gcont, which ensures common DC bias between unit cells. A DC voltage from 0 to 10.2 V can vary μc (Bottom) from 0 to 1 eV to provide frequency tunability.

Properties of Size Insulation for Different Silicon Thickness under Alternated Electrical Stress of Partial Vacuums

هدف البحث إلى دراسة معمقة في الخصائص الحجمية للعازلية السيليكونية من خلال التركيز على ماهية العلاقة بين عامل الضياع و ثابت العازلية من جهة و بين حجم العازلية المجهدة بالحقل الكهربائي من جهة أخرى، وتم تقسيم البحث على ثلاثة محاور،الأول تناول: تصميم نظام أقطاب توتر عالي بحلقات حماية لقياس الخصائص الحجمية، والثاتي: الموديل الرياضي، والثالث: الموديل التجريبي، و خلص البحث إلى إثبات تأثر خصائص العزل الحجمية و خصوصاٌ عامل الضياع بحجم العازلية كما أنه تم التعبير عن هذه الظاهرة من خلال موديل رياضي تجريبي. و تعزز هذه الدراسة بنتائجها عملية التحري عن جودة العازلية الكهربائية كمياٌ و نوعياٌ.

Stochastic and multi-objective design of photonic devices with machine learning

Compact and highly performing photonic devices are characterized by non-intuitive geometries, a large number of parameters, and multiple figures of merit. Optimization and machine learning techniques have been explored to handle these complex designs, but the existing approaches often overlook stochastic quantities. As an example, random fabrication uncertainties critically determines experimental device performance. Here, we present a novel approach for the stochastic multi-objective design of photonic devices combining unsupervised dimensionality reduction and Gaussian process regression. The proposed approach allows to efficiently identify promising alternative designs and model the statistic of their response. Incorporating both deterministic and stochastic quantities into the design process enables a comprehensive analysis of the device and of the possible trade-offs between different performance metrics. As a proof-of-concept, we investigate surface gratings for fiber coupling in a silicon-on-insulator platform, considering variability in structure sizes, silicon thickness, and multi-step etch alignment. We analyze 86 alternative designs presenting comparable performance when neglecting variability, discovering on the contrary marked differences in yield and worst-case figures for both fiber coupling efficiency and back-reflections. Pareto frontiers demonstrating optimized device robustness are identified as well, offering a powerful tool for the design and optimization of photonic devices with stochastic figures of merit.

Monitoring of carbon ion therapeutic beams with thin silicon sensors

Single ion counting in particle therapy may lead to new beam monitoring systems, enabling innovative delivery strategies that are faster and more sensitive than those currently used in clinics. Previous studies carried out by the University and the National Institute of Nuclear Physics (INFN) of Turin have demonstrated the feasibility of using thin silicon detectors to count single protons in clinical beams. The aim of this work is to report the performance of a strip-segmented 60-μm thick silicon PIN sensor used for single carbon ion discrimination. All measurements were performed using the CNAO synchrotron at different beam energies covering the clinical energy range (115–399 MeV/u). Signals from the sensor strips were read using a custom amplifier board and sampled with a 5 GS/s digitizer. The carbon ion signals were analyzed in terms of amplitude, duration, and deposited charge at different sensor bias voltages.

The effect of porous silicon thickness and pore size on the electrical properties of TiO2/PS heterojunctions

Heterojunctions made by depositing Titanium dioxide (TiO2) on porous silicon using the sol-gel method were electrically characterized. It was found that charge transfer mechanisms are dependent on the porosity and layer thickness, as well as the pore size. For the case of devices fabricated in mesoporous matrix, the current-potential curve appears like a Schottky ohmic contact, associated with the predominance of the tunneling charge transfer mechanism, depicting a reduction in current intensity as the meso-PS thickness increases. This behavior was related to the increase of TiO2 into the pores, which in turn leads to the hole concentration decrease from around 1020 to 1012 cm−3 because the compensation effect, as revealed by the Mott-Schottky analysis, while the impedance analysis shows that this reduction in holes is traduced as increase of the resistance associated with each interface. In the case of the devices yielded in macroporous layers, it was found that devices with thinner layers behaves as hole-blocking device or even as ohmic contact, depending on the amount of interface states. In addition, in hole blocking devices, the presence of at least two diodes with opposite behavior is marked.

Suspended micro thermometer for anisotropic thermal transport measurements

The investigation of heat flow in nanostructures and low-dimensional system is still a challenging task, though it becomes more and more important for an effective thermal management of microdevices. In this work, we present the fabrication and characterization of a device designed to measure the in-plane thermal properties of nanomaterials in multiple directions. Additionally, the device allows to perform electrical and optical measurements simultaneously. This allows to spatially resolve eventual thermal property anisotropies and the correction of measurements by accounting for the contact resistances. The fabrication has no element that is related to the specific nanostructure to be investigated. The presented concept can be extended for other (quasi-) two dimensional systems and other nanostructures. Finally, we validated the accuracy of the device using a 250 nm thick silicon lamella, which serves as a reference system and offers the possibility to explore the impact of a dominant thermal contact resistance. We have used Raman thermometry to calculate the effective lattice temperature of the lamella as a function of the applied temperature on the membranes. We extracted an average interfacial thermal conductance of 2.4±0.8×104WK−1m−2.

A soft, scalable and adaptable multi-contact cuff electrode for targeted peripheral nerve modulation

BackgroundCuff electrodes target various nerves throughout the body, providing neuromodulation therapies for motor, sensory, or autonomic disorders. However, when using standard, thick silicone cuffs, fabricated in discrete circular sizes, complications may arise, namely cuff displacement or nerve compression, due to a poor adaptability to variable nerve shapes and sizes encountered in vivo. Improvements in cuff design, materials, closing mechanism and surgical approach are necessary to overcome these issues.MethodsIn this work, we propose a microfabricated multi-channel silicone-based soft cuff electrode with a novel easy-to-implant and size-adaptable design and evaluate a number of essential features such as nerve-cuff contact, nerve compression, cuff locking stability, long-term integration and stimulation selectivity. We also compared performance to that of standard fixed-size cuffs.ResultsThe belt-like cuff made of 150 μm thick silicone membranes provides a stable and pressure-free conformal contact, independently of nerve size variability, combined with a straightforward implantation procedure. The adaptable design and use of soft materials lead to limited scarring and demyelination after 6-week implantation. In addition, multi-contact designs, ranging from 6 to 16 electrodes, allow for selective stimulation in models of rat and pig sciatic nerve, achieving targeted activation of up to 5 hindlimb muscles.ConclusionThese results suggest a promising alternative to classic fixed-diameter cuffs and may facilitate the adoption of soft, adaptable cuffs in clinical settings.

A two-layer Timepix3 stack for improved charged particle tracking and radiation field decomposition

Abstract We characterize a novel instrument designed for radiation field decomposition and particle trajectory reconstruction for application in harsh radiation environments. The device consists of two Timepix3 assemblies with 500 µm thick silicon sensors in a face-to-face geometry. These detectors are interleaved with a set of neutron converters: 6LiF for thermal neutrons, polyethylene (PE) for fast neutrons above 1 MeV, and PE with an additional aluminum recoil proton filter for neutrons above ∼4 MeV. Application of the coincidence and anticoincidence technique together with pattern recognition allows improved separation of charged and neutral particles, their discrimination against γ-rays and assessment of the overall directionality of the fast neutron field. The instrument's charged particle tracking and separation capabilities were studied at the Danish Center for Particle Therapy (DCPT), the Proton Synchrotron, and Super Proton Synchrotron with protons (50–240 MeV), pions (1–10 GeV/c and 180 GeV/c). After developing temporal and spatial coincidence assignment methodology, we determine the relative amount of coincident detections as a function of the impact angle, present the device's impact angle resolving power (both in coincidence and anticoicidence channels). The detector response to neutrons was studied at the Czech Metrology Institute (CMI), at n_ToF and the Los Alamos Neutron Science Center (LANSCE), covering the entire spectrum from thermal up to 600 MeV. The measured tracks were assigned to their corresponding neutron energy by application of the time of flight technique. We present the achieved neutron detection efficiency as a function of neutron kinetic energy and demonstrate how the ratio of events found below the different converters can be used to assess the hardness of the neutron spectrum. As an application, we determine the neutron content within a PMMA phantom just behind the Bragg-peak during clinical irradiation condition with protons of 160 MeV.

Application of GRIN-lens-based in-line digital holographic microscopy to automatic detection and localization of particles released from a MEMS device.

Recently, we developed a compact and easy-to-implement in-line digital holographic microscope (DHM) using a GRIN rod lens, which provides better resolution (1.3µm) compared with commonly used pinhole-based DHM setups. Here, we employ this microscope to acquire 3D holographically reconstructed images of silica microparticles, within the 10-300µm size range, launched/released from a microelectro-mechanical systems (MEMS) device. To the best of our knowledge, this is the first time that a MEMS device is implemented to store and launch microparticles. The custom-designed MEMS device consists of a 50µm thick flat circular silicon ultrasonic membrane mounted on an off-the-shelf piezoelectric transducer. Moreover, we propose and experimentally demonstrate a new automatic hybrid detection and localization method for particle field holography that benefits from a combination of well-known minimum intensity and variance of gray level distribution focus metrics. This robust method is fast and provides precise d e p t h/z position of particles. The proposed method is applied for particle testing of the MEMS device, reconstructing 3D visualization, and measuring the size and velocity of released particles. The obtained experimental results show that the velocity of released particles, previously dry-loaded onto the MEMS device, is of the order of a few tens of cm/s.

Design of back-contact interface of Cu(In,Ga)Se<sub>2</sub> solar cells by single-target magnetron sputtering

Thin-film solar cells provide an opportunity to reduce the cost of converting solar energy into electricity by replacing expensive and thick silicon wafers, which account for more than 50% of the total cost of photovoltaic (PV) modules. However, many thin-film solar cell materials result in low PV performance due to enhanced recombination through defect states. Cu(In,Ga)Se<sub>2</sub> (CIGS) is a promising thin-film solar cell material due to its direct tunable bandgap, high absorption coefficient, low effective electron and hole mass, and abundant constituent elements. Among them, magnetron sputtering or selenization technology is widely used to catch up with the development of preparing large-area CIGS thin-film solar cells because of its uniform film composition and simple process. However, the use of toxic gases such as H<sub>2</sub>Se and H<sub>2</sub>S and the difficulty in forming gradient bandgaps limit their development. In this work, the “V” Ga gradient classification of the absorbing layer of CIGS solar cells is realized by sputtering CuGaSe<sub>2</sub> (CGS) thin layers of different thickness values in the room temperature layer by sputtering and selenium-free methods of quaternary target sputtering. Firstly, the microstructure of the film is characterized by scanning electron microscope, X-ray diffraction, Raman and X-ray photoelectron spectroscopy, and when the CGS layer is located in the middle of the low-temperature layer, the grain size of the film is the largest, the crystallinity is the best, forming a “V-shaped” structure of CGI on the back of the absorbing layer. Subsequently, IV and external quantum efficiency (EQE) tests show that the optimized cell efficiency is as high as 15.04%, and the light response intensity is enhanced in the 300 －1200 nm band. Finally, the admittance spectrum(AS) test shows that the defect energy level of the solar cell changes from In<sub>Ga</sub> defect to <i>V</i><sub>Cu</sub> defect of lower energy level, and the defect density decreases from 7.04×10<sup>15</sup> cm<sup>–3</sup> to 5.51×10<sup>15</sup> cm<sup>–3</sup>. This is comparable to the recording efficiency of the current single-target magnetron sputtering CIGS solar cells, demonstrating good application prospects.

Numerical Study of Laser Welding of 270 μm Thick Silicon–Steel Sheets for Electrical Motors

In this study, the shape of laser welding parts required to develop a welding automation system was analyzed to improve the production process of thin-plate silicon–steel. During laser welding, a welding defect occurs in the welding area, resulting in beads. This can be measured and analyzed through computational fluid dynamics. When welding thin plates with a laser, precise parameter settings are required to reduce bead height and side effects to improve weld quality. Twelve simulation cases with different laser powers and scan speeds were carried out to compare bead heights. We discussed ways to improve the productivity of electrical steel sheets by applying data collected through simulations of a laser welding automation system.

Nanostructured anti-reflection coating for absorption enhancement in perovskite silicon tandem solar cells

Perovskite-silicon tandem solar cells have captured the attention of the solar cell research community due to the advantages of perovskites, such as, an easy fabrication process using sol-gel methods and silicon bottom cells that can be fabricated using well-established fabrication techniques. The present study discusses the design, optimization, and numerical analysis related to the role of nanostructured anti-reflection coating design for perovskite (MAPbI3) silicon tandem solar cells. In the design, the top cell is taken as MAPbI3 and the bottom cell is C-silicon. The anti-reflection coating is designed with SiO2 nanoparticles embedded in ITO. These nanostructured top anti-reflection coating results are compared with its planar top cell counterpart. SiO2 nanoparticle diameter and interparticle separation are optimized to get maximum absorption in the top cell. Upon optimization, it was found that a design having SiO2 nanoparticles with a diameter of 60 nm and no interparticle separation showed the most reduction in reflection, which in turn led to an increase in absorption in the top cell. The proposed structure enhances current density by 8.3% over the planar cell. This top cell current is matched to the bottom silicon thickness. These findings were validated using Mie scattering and the Bruggmann effective medium approximation.

Retention Evaluation of Implant-Supported Mandibular Overdenture Using Two Different Attachment Systems: An in Vitro Study

Objective: The purpose of this in vitro study was to evaluate the retentive behavior of implant-supported overdenture using two different attachment systems (locator and milled bar-clip attachment system).
 Methods: Six edentulous mandibular models were fabricated from cold‑cure PMMA; the denture-bearing area of the acrylic resin model was covered by an approximately 1.5 mm thick silicone resilient liner to simulate mucosa. The Study models were divided into three groups: Model A (locator), Model B (milled bar-clip attachment system without extension), and Model C (milled bar-clip attachment system with 1cm extension). However, for each study model, a complete mandibular denture was constructed. Anterior, posterior, and central dislodging forces were measured by digital force gauge at the beginning of the study (Initial retention) and after 540 courses of consecutive pulling and inserting the prosthesis (final retention), which was to simulate six months of overdenture use assuming three daily removals and insertions for oral hygiene practice.
 Results: There were statistically significant differences in retention between the group models, and milled bar-clips attachment systems revealed the highest retentive capacity. However, after six months of simulated use, there was a significant retention loss; retention of Model B recorded the highest percentage loss of 55.1%, while Model A recorded the most minor retention loss of 24%. 
 Conclusions: The bar and clip attachment system offered higher retentive values than the locator attachment system. However, the retention loss was correlated to the particular attachment system, and the bar–clip attachment systems had the highest percent of retention loss. In contrast, the locator attachments were associated with acceptable retention, simplicity, and minimal retention.

Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride

Dynamic-mode cantilever sensors are based on the principle of a one-side clamped beam being excited to oscillate at or close to its resonance frequency. An external interaction on the cantilever alters its oscillatory state, and this change can be detected and used for quantification of the external influence (e.g. a force or mass load). A very promising approach to significantly improve sensitivity without modifying the established laser-based oscillation transduction is the co-resonant coupling of a micro- and a nanocantilever. Thereby, each resonator is optimized for a specific purpose, i.e. the microcantilever for reliable oscillation detection and the nanocantilever for highest sensitivity through low rigidity and mass. To achieve the co-resonant state, the eigenfrequencies of micro- and nanocantilever need to be adjusted so that they differ by less than approximately 20%. This can either be realized by mass deposition or trimming of the nanocantilever, or by choice of dimensions. While the former is a manual and error-prone process, the latter would enable reproducible batch fabrication of coupled systems with predefined eigenfrequency matching states and therefore sensor properties. However, the approach is very challenging as it requires a precisely controlled fabrication process. Here, for the first time, such a process for batch fabrication of inherently geometrically eigenfrequency matched co-resonant cantilever structures is presented and characterized. It is based on conventional microfabrication techniques and the structures are made from 1 µm thick low-stress silicon nitride. They comprise the microcantilever and high aspect ratio nanocantilever (width 2 µm, thickness about 100 nm, lengths up to 80 µm) which are successfully realized with only minimal bending. An average yield of % of intact complete sensor structures per wafer is achieved. Desired geometric dimensions can be realized within ±1% variation for length and width of the microcantilever and nanocantilever length, ±10% and ±20% for the nanocantilever width and thickness, respectively, resulting in an average variation of its eigenfrequency by 11%. Furthermore, the dynamic oscillation properties are verified by vibration experiments in a scanning electron microscope. The developed process allows for the first time the batch fabrication of co-resonantly coupled systems with predefined properties and controlled matching states. This is an important step and crucial foundation for a broader applicability of the co-resonant approach for sensitivity enhancement of dynamic-mode cantilever sensors.

Thin and Ultra-thin Sidewall Protected P-WLCSP

Diversity in packaging for a strong supply chain requires higher performance and lower cost processes for new manufacturers. Six-side protected, aka “6S or fully protected”, CSP is an emerging and rapidly growing market. Fully protected CSP (without substrates or lead-frames) was first implemented with processes such as M-series and eWLB. These processes require costly and complex die reconstitution, expensive tapes, molding, and other operations most common to FO to obtain 6-side die protection. These steps can be eliminated in a wafer level process to provide high-performance low-cost P-WLCSP to enable new CSP manufacturing capability, Fan-In and Chiplets. American Semiconductor’s Semiconductor-on-Polymer (SoP) 300mm SoP-TM, a P-WLCSP process, is an advanced packaging process optimized for protected CSP, fan-in, and chiplets. Protected FI process innovations can improve performance in power devices, RF switches, photonic IC (PIC), die stacking, and thin board applications. This paper builds on the SoP-TM process development provided at the IMAPS Symposium earlier this year with the addition of first silicon data for electrical test chips. SoP-TM test chip features include 10um silicon thickness, metal interconnect and micro-bumps, smooth silicon sidewalls and 6-side polyimide encasement. Reliability data and testing is a key area of investigation for thin-device technology. Ultra-thin device reliability test methods under consideration for new NIST standards will be presented. Mechanical, high temperature and high humidity reliability for SoP-TM test chips, Chip-on-Flex (COF) and Flip Chip using the new test methods will be presented.

Low-loss operation of silicon-on-insulator integrated components at 2.6-2.7 µm.

Development of mid-infrared photonics is gaining attention, driven by a multitude of sensing applications requiring increasingly compact and cost-effective photonics systems. To this end, low-loss operation of µm-scale silicon-on-insulator photonic integration elements is demonstrated for the 2.6-2.7 µm wavelength region. The platform utilizes the 3 µm thick silicon core layer technology enabling demonstration of low-loss and low birefringence waveguides. Measurements of record low single mode waveguide propagation losses of 0.56 ± 0.09 dB/cm and bend losses <0.08 dB for various miniaturized bend geometries are presented and validated by simulation. Furthermore, a wavelength filter based on echelle grating that allows to select several operating channels within the 2.64-2.7 µm band, with a linewidth of ∼1.56 nm for each channel is presented.

Design, Fabrication, and Application of Micro-Structured Surfaces for Laser-Induced Breakdown Spectroscopic Analysis of Liquids: A Sample-Loading Target Development Studies

In this paper, design, fabrication, and application studies of a sample loading target patterned with periodical micro-structures were presented. Two different geometrical shapes; triangular prisms and cylinders of two different feature sizes; 5-µm, and 20-µm, were photo-lithographically patterned on Si-wafer substrates, and dry etched to 10 µm height. Followed by a 1-µm thick silicon nitride film coating over micro-patterned substrates, final products were obtained after dicing into one-inch size squares, each containing 36 patterned sample loading areas. Among the three different patterns studied; a geometric design with 20-µm diameter cylinders exhibited a more effective task in increasing the LIBS signal strength, compared to the other two patterns. The characterization of the surface morphology and the size-shape distribution of the micro-patterns were carried out through optical and scanning electron microscopic measurements. SEM images proved a more effective ablation occurring on triangular prism micro-structured surfaces that can be associated with an increased path length and enhanced absorption of the laser beam on the flat surfaces of triangular prism via multiple reflections. The results of structured surfaces were also compared with the ones from non-structured surfaces of 300 nm and 1000 nm thicknesses of silicon nitride-coating. The applications of micro-structured surfaces for heavy metals analysis were performed with Cr and Pb solutions via dried-droplet LIBS methodology. The enhancement factor of 4 for Pb(I) 405.8 nm, and 8 for Cr(I) 428.9 nm were observed from the 20-µm diameter cylinder, CYL-20, surfaces compared to 300 nm thick Si3N4 surfaces, respectively. This study of micro-structuring substrate surfaces with an emphasis on the signal enhancement effect is promising in terms of improving the capacity and limitations of the dried-droplet methodology by LIBS.

Registration of Functioning of a Single Horseradish Peroxidase Macromolecule with a Solid-State Nanopore

Currently, nanopore-based technology for the determination of the functional activity of single enzyme molecules continues its development. The use of natural nanopores for studying single enzyme molecules is known. At that, the approach utilizing artificial solid-state nanopores is also promising but still understudied. Herein, we demonstrate the use of a nanotechnology-based approach for the investigation of the enzymatic activity of a single molecule of horseradish peroxidase with a solid-state nanopore. The artificial 5 nm solid-state nanopore has been formed in a 40 nm thick silicon nitride structure. A single molecule of HRP has been entrapped into the nanopore. The activity of the horseradish peroxidase (HRP) enzyme molecule inserted in the nanopore has been monitored by recording the time dependence of the ion current through the nanopore in the course of the reaction of 2,2′-azino-bis(3-ethylbenzothiazoline-6-sulfonate) (ABTS) oxidation reaction. We have found that in the process of ABTS oxidation in the presence of 2.5 mM hydrogen peroxide, individual HRP enzyme molecules are able to retain activity for approximately 700 s before a decrease in the ion current through the nanopore, which can be explained by structural changes of the enzyme.

High-performance grating couplers on 220-nm thick silicon by inverse design for perfectly vertical coupling

Efficient grating couplers (GCs) for perfectly vertical coupling are difficult to realize due to the second-order back reflection. In this study, apodized GCs (AGCs) are presented for achieving perfectly-vertical coupling to 220 nm thick silicon-on-insulator (SOI) waveguides in the C-band. We compare the performance of the AGCs to that of uniform GCs (UGCs) and demonstrate the superiority of the former. The AGCs were obtained through inverse design using gradient-based optimization and were found to effectively suppress back reflection and exhibit better matching to the Gaussian beam profile. The design and measurement results show that AGCs have a 3 dB lower coupling loss than UGCs. We fabricated focusing AGCs by electron beam lithography with a single, 70 nm shallow etch and a minimum feature size of 100 nm, which makes them compatible with CMOS technology. The AGCs achieved a coupling efficiency of −5.86 dB for perfectly vertical coupling. Overall, our results demonstrate the potential of AGCs for achieving high-performance coupling in the C-band on the SOI platform.

VIS-NIR TMOKE enhanced dielectric-metal hybrid structure for high performance dual-channel sensing.

Magneto-plasmon sensors based on the transverse magneto-optical Kerr effect (TMOKE) have been extensively studied in recent years. In this paper, we theoretically propose a hybrid structure composed of a one-dimensional bismuth iron garnet: yttrium iron garnet (BIG: YIG) nanowire arrays and thin film stack, which is grown on an infinite thick silicon wafer. The thin film stack, from top to bottom, consists of the following layers: BIG: YIG, SiO2, and Au. By exciting the magnetic dipole resonance mode between the cylindrical nanowires and the SPP mode on the surface of the Au film, dual-channel sensing has been achieved in both visible and infrared spectra. The results demonstrate that the TMOKE response spectrum of the structure supports ultra-narrow linewidths of 0.03 nm in the visible light range and 1.54 nm in the infrared range. By changing the refractive index of the analyte, the detected sensitivity of the sensor system in visible and infrared bands is 553 nm RIU-1 and 285 nm RIU-1, and the Figure of merit (FOM) can reach up to 69125 RIU-1 and 303 RIU-1, respectively. This work provides a theoretical basis and a feasible approach for the design of dual channel gas sensors.