Thick films of CdTe were deposited on amorphous quartz plates at normal and oblique incidences in vacuum, and their oriented growth was studied by X-ray diffraction and by electronmicroscope observation. It was found that fibrous crystallites having the [111] growth axis inclined to the incident beam. Lamellae structure normal to the fiber axis was visualized on etching or cleaving. The crystallographic polarity along the [111] direction of thick CdTe films deposited on amorphous quartz as well as some other substances was determined from a measurement of the piezoelectric effect of the films; the substrate side of most films was the Cd(111) plane and the film surface side was the Te(111) plane. The photovoltaic effect of vacuum-deposited films was discussed in terms of the crystallographic characteristics such as the polarity and the cubic-hexagonal transition.