The application of low Z coatings on various structurally strong components of a controlled thermonuclear tokamak fusion reactor is expected to reduce the plasma contamination and power loss. With this view, coatings of beryllium have been given on different substrates like (304 and 316) stainless steel, monel-400, molybdenum, copper, and graphite in a specially designed vacuum deposition unit employing physical vapor deposition technique, and its morphology studied as a function of deposition parameters such as substrate temperature, coating thickness, deposition rate, and angle of deposition. It has been characterized using various analytical techniques. Its morphology has been studied with the help of a scanning electron microscope. Coating adherence and hardness have been measured. Results obtained have been analyzed and discussed.