A discussion is given of the processes by which atoms are displaced from their lattice sites by incident fast electrons. In addition to direct displacement by the incident electron, expressions are derived for the fraction of atoms displaced by fast moving atoms and by fast secondary electrons, both of which are generated initially by the incident electron. A discussion of thermal spikes is given. A thermal spike process is discussed that might lead to the generation of defects with x irradiation in materials that exhibit a threshold energy for a displacement by a charged particle.
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