It has been demonstrated that dark-field, atomic number sensitive images can be obtained either inscanning transmission electron microscopy (STEM) using a high-angle annular dark field detector (HAADF) or in transmission electron microscopy (TEM) using an on-axis objective aperture under the hollow cone beam illumination. The images are formed using the high-angle diffusely scattered electrons presuming that the high angle Bragg reflections are weak. Diffuse scattering can be generated by both thermal diffuse scattering (TDS) and Huang scattering, The local lattice distortion due to the presence of defects, dislocations, lattice relaxation, surfaces, or interfaces, is a source for generating diffuse scattering (or Huang scattering). In these cases, the final image contrast may not be sensitive to the local composition, thus eliminating the Zcontrast effect. The diffraction effect in the imagesformed by diffusely scattered electrons is easily seen in the TEM case. In the diffraction pattern of gold shown in Fig. 1, <110> streaks produced by TDS are clearly seen. The bright field image shows some bending and strain contrast. Most of the features observed in the bright field imageappear in the dark field image of the diffusely scattered electrons.