The effect and mechanism of surface texture on friction have been extensively explored, such as storing the abrasive and reducing the real contact area. However, studying the impact of the interface texture remains crucial, especially as the texture size approaches the nanoscale. In the present work, the silicon substrate with different parameters nanotexture was fabricated using a metal-assisted chemical etching process, and the graphene sheets embedded carbon (GSEC) film was deposited on the nanotextured substrate via a low-energy electron irradiation process to produce the interface nanotextured carbon films. After the addition of the interface nanotexture, the tribological performance of carbon films exhibited significant enhancement, with the degree of improvement being influenced by the parameters of the interface nanotexture. A super-low wear rate was achieved, with a value of 6.54 ± 0.70 × 10−8 mm3/N m. The improved tribological performance is due to the enhancement of film-substrate adhesion strength facilitated by interface nanotexture, and its role in promoting the rapid formation of a stable transfer film on the counter-grinding ball. The carbon film with nanotexture displays a small size of the abrasive particles, which contributes to the stabilization of the friction process.
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